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Fabrication and photoluminescence characteristics of In2O3 nanohillocks |
Wei He-Lin(魏合林)†, Zhang Lei(张磊), Liu Zu-Li(刘祖黎), and Yao Kai-Lun(姚凯伦) |
Department of Physics, Huazhong University of Science and Technology, Wuhan 430074, China |
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Abstract Uniformly distributed polycrystalline indium nanohillocks are synthesized on silicon substrates with Au catalyst by using the radio frequency magnetic sputtering technique. The results show that the Au catalyst plays a key role in the formation of indium nanohillocks. After thermally oxidizing the indium nanohillocks at 500 ℃ in air for 5 h, the indium nanohillocks totally transform into In2O3 nanohillocks. The energy-dispersive X-ray spectroscopy result indicates that many oxygen vacancies and oxygen-indium vacancy pairs exist in the In2O3 nanohillocks. Photoluminescence spectra under an Ne laser excitation at 280 nm show broad emissions at 420 nm and 470 nm with a shoulder at 450 nm related to oxygen vacancies and oxygen-indium vacancies at room temperature.
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Received: 27 July 2010
Revised: 29 June 2011
Accepted manuscript online:
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PACS:
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81.15.Cd
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(Deposition by sputtering)
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68.55.-J
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78.55.-m
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(Photoluminescence, properties and materials)
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Fund: Project supported by the National Natural Science Foundation of China (Grant No. 10574047) and the Key Program of the
National Natural Science Foundation of China (Grant No. 20490210). |
Cite this article:
Wei He-Lin(魏合林), Zhang Lei(张磊), Liu Zu-Li(刘祖黎), and Yao Kai-Lun(姚凯伦) Fabrication and photoluminescence characteristics of In2O3 nanohillocks 2011 Chin. Phys. B 20 118102
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