Effects of N2/O2 flow rate on the surface properties and biocompatibility of nano-structured TiOxNy thin films prepared by high vacuum magnetron sputtering

doi:10.1088/1674-1056/24/7/075202

Abstract

NiTi shape memory alloys (SMA) have many biomedical applications due to their excellent mechanical and biocompatible properties. However, nickel in the alloy may cause allergic and toxic reactions, which limit some applications. In this work, titanium oxynitride films were deposited on NiTi samples by high vacuum magnetron sputtering for various nitrogen and oxygen gas flow rates. The x-ray diffraction (XRD) and x-ray photoelectron spectroscopy (XPS) results reveal the presence of different phases in the titanium oxynitride thin films. Energy dispersive spectroscopy (EDS) elemental mapping of samples after immersion in simulated body fluids (SBF) shows that Ni is depleted from the surface and cell cultures corroborate the enhanced biocompatibility in vitro.

Keywords: titanium oxynitride films magnetron sputtering biocompatibility

Received: 08 September 2014
Revised: 19 February 2015
Accepted manuscript online:

PACS:	52.40.Hf	(Plasma-material interactions; boundary layer effects)
	81.15.Cd	(Deposition by sputtering)
	87.85.jj	(Biocompatibility)

Fund:

Project supported by the Higher Education Commission, Hong Kong Research Grants Council (RGC) General Research Funds (GRF), China (Grant No. 112212) and the City University of Hong Kong Applied Research Grant (ARG), China (Grant No. 9667066).

Corresponding Authors: R. Ahmad
E-mail: ahriaz@gcu.edu.pk

Cite this article:

Sehrish Saleem, R. Ahmad, Uzma Ikhlaq, R. Ayub, Jin Wei Hong, Xu Rui Zhen, Li Peng Hui, Khizra Abbas, Paul K. Chu Effects of N₂/O₂ flow rate on the surface properties and biocompatibility of nano-structured TiO_xN_y thin films prepared by high vacuum magnetron sputtering 2015 Chin. Phys. B 24 075202

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Effects of N2/O2 flow rate on the surface properties and biocompatibility of nano-structured TiOxNy thin films prepared by high vacuum magnetron sputtering

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Effects of N₂/O₂ flow rate on the surface properties and biocompatibility of nano-structured TiO_xN_y thin films prepared by high vacuum magnetron sputtering