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Chin. Phys. B, 2008, Vol. 17(11): 4242-4246    DOI: 10.1088/1674-1056/17/11/047
PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES Prev   Next  

Improving the uniformity of RF-plasma density by a humped variable-gap spiral antenna

Xu Xu (徐 旭), Li Lin-Sen (李林森), Liu Feng (刘 峰), Zhou Qian-Hong (周前红), Liang Rong-Qing (梁荣庆)
Applied Ion Beam Physics Laboratory, Institute of Modern Physics, Fudan University, Shanghai 200433, China
Abstract  This paper develops a humped spiral antenna of top inductively coupled plasma with variable gap. Comparing with planar spiral antennae, it investigates the performance of humped spiral antennae in the calculated electromagnetic configurations and experimental results. It finds that the humped antenna has the improved uniformity of plasma density in the radial direction and the decreased electron temperature in the top inductively coupled plasma. By experimental and theoretical analyses, the plasma performance in the case of humped antennae is considered to be the combined results of the uniform electromagnetic configurations and the depressed capacitively coupling effect.
Keywords:  inductively coupled plasma      Langmuir probe      planar antenna      density uniformity  
Received:  02 March 2008      Revised:  12 March 2008      Accepted manuscript online: 
PACS:  52.40.Fd (Plasma interactions with antennas; plasma-filled waveguides)  
  52.25.-b (Plasma properties)  
  52.70.Ds (Electric and magnetic measurements)  
Fund: Project supported by National Natural Science Foundation of China (Grant No 50577009).

Cite this article: 

Xu Xu (徐 旭), Li Lin-Sen (李林森), Liu Feng (刘 峰), Zhou Qian-Hong (周前红), Liang Rong-Qing (梁荣庆) Improving the uniformity of RF-plasma density by a humped variable-gap spiral antenna 2008 Chin. Phys. B 17 4242

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