Analysis and finite element simulation of electromagnetic heating in the nitride MOCVD reactor
Li Zhi-Ming(李志明),Hao Yue(郝跃)†, Zhang Jin-Cheng(张进成), Xu Sheng-Rui(许晟瑞), Ni Jin-Yu(倪金玉), and Zhou Xiao-Wei(周小伟)
School of Microelectronics, Xidian University, Xi'an 710071, China;Key Laboratory of Ministry of Education for Wide Band-Gap Semiconductor Materials and Devices, Xi'an 710071, China
Abstract Electromagnetic field distribution in the vertical metal organic chemical vapour deposition (MOCVD) reactor is simulated by using the finite element method (FEM). The effects of alternating current frequency, intensity, coil turn number and the distance between the coil turns on the distribution of the Joule heat are analysed separately, and their relations to the value of Joule heat are also investigated. The temperature distribution on the susceptor is also obtained. It is observed that the results of the simulation are in good agreement with previous measurements.
Received: 12 August 2008
Revised: 14 April 2009
Accepted manuscript online:
Fund: Project supported by the State Key
Program of National Natural Science Foundation of China (Grant No
60736033) and the National Natural Science Fund of China (Grant No
60676048).
Cite this article:
Li Zhi-Ming(李志明),Hao Yue(郝跃), Zhang Jin-Cheng(张进成), Xu Sheng-Rui(许晟瑞), Ni Jin-Yu(倪金玉), and Zhou Xiao-Wei(周小伟) Analysis and finite element simulation of electromagnetic heating in the nitride MOCVD reactor 2009 Chin. Phys. B 18 5072
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