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A novel low-loss four-bit bandpass filter using RF MEMS switches |
| Lulu Han(韩路路)1,2,3,4, Yu Wang(王宇)1,2,3,4, Qiannan Wu(吴倩楠)2,3,4,5,†, Shiyi Zhang(张世义)1,2,3,4, Shanshan Wang(王姗姗)1,2,3,4, and Mengwei Li(李孟委)1,2,3,4,‡ |
1 School of Instrument and Electronics, North University of China, Taiyuan 030051, China;
2 Nantong Institute of Intelligent Opto-Mechatronics, North University of China, Nantong 226000, China;
3 Center for Microsystem Integration, North University of China, Taiyuan 030051, China;
4 Academy for Advanced Interdisciplinary Research, North University of China, Taiyuan 030051, China;
5 School of Science, North University of China, Taiyuan 030051, China |
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Abstract This paper details the design and simulation of a novel low-loss four-bit reconfigurable bandpass filter that integrates microelectromechanical system (MEMS) switches and comb resonators. A T-shaped reconfigurable resonator is reconfigured in a 'one resonator, multiple MEMS switches' configuration and used to gate the load capacitances of comb resonators so that a multiple-frequency filtering function is realized within the 7-16 GHz frequency range. In addition, the insertion loss of the filter is less than 1.99 dB, the out-of-band rejection is more than 18.30 dB, and the group delay is less than 0.25 ns. On the other hand, the size of this novel filter is only 4.4 mm×2.5 mm×0.4 mm. Our results indicate that this MEMS reconfigurable filter, which can switch 16 central frequency bands through eight switches, achieves a low insertion loss compared to those of traditional MEMS filters. In addition, the advantages of small size are obtained while achieving high integration.
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Received: 13 July 2021
Revised: 05 August 2021
Accepted manuscript online: 07 August 2021
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PACS:
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85.85.+j
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(Micro- and nano-electromechanical systems (MEMS/NEMS) and devices)
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| Fund: Project supported by the National Defense Technology Industry Strong Foundation Project of China (Grant No. JCKY2018~* ~* ~*~*06) and the Information System New items Project (Grant Nos. 2018~*~*~*~*26 and 2019~*~*~*~*10). We thank the Key Laboratory of Instrumentation Science and Dynamic Measurement for their support. |
Corresponding Authors:
Qiannan Wu, Mengwei Li
E-mail: qiannanwoo@nuc.edu.cn;lmwnuc@163.com
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Cite this article:
Lulu Han(韩路路), Yu Wang(王宇), Qiannan Wu(吴倩楠), Shiyi Zhang(张世义), Shanshan Wang(王姗姗), and Mengwei Li(李孟委) A novel low-loss four-bit bandpass filter using RF MEMS switches 2022 Chin. Phys. B 31 018506
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