Superconducting membrane mechanical oscillator based on vacuum-gap capacitor

doi:10.1088/1674-1056/27/6/060701

Abstract

Using the diluted S1813 UV photoresist as a sacrificial layer, we successfully fabricate a superconducting suspended parallel-plate capacitor, in which the top layer of aluminum film acts as a membrane mechanical resonator. Together with a superconducting octagonal spiral inductor, this parallel-plate capacitor constitutes a superconducting microwave resonator. At mK temperature, the transmission characteristic and spectrum of the microwave resonator are measured. Sideband frequencies caused by the vibration of the membrane mechanical resonator are clearly demonstrated. By down-converting with a mixer, the dependence of fundamental frequency and its harmonics on the input microwave power are clearly demonstrated, which is consistent with the numerical simulation.

Keywords: superconducting membrane mechanical oscillator vacuum-gap capacitor

Received: 16 January 2018
Revised: 29 March 2018
Accepted manuscript online:

PACS:	07.10.Cm	(Micromechanical devices and systems)
	81.07.Oj	(Nanoelectromechanical systems (NEMS))
	85.25.-j	(Superconducting devices)
	85.85.+j	(Micro- and nano-electromechanical systems (MEMS/NEMS) and devices)

Fund:

Project supported by the National Key Research and Development Program of China (Grant No.2016YFA0301801),the National Natural Science Foundation of China (Grant Nos.11474154 and 61521001),and the Priority Academic Development Program of Jiangsu Higher Education Institutions and Dengfeng Project B of Nanjing University,China.

Corresponding Authors: Guo-Zhu Sun
E-mail: gzsun@nju.edu.cn

Cite this article:

Yong-Chao Li(李永超), Xin Dai(戴欣), Jun-Liang Jiang(江俊良), Jia-Zheng Pan(潘佳政), Xing-Yu Wei(魏兴雨), Ya-Peng Lu(卢亚鹏), Sheng Lu(卢盛), Xue-Cou Tu(涂学凑), Guo-Zhu Sun(孙国柱), Pei-Heng Wu(吴培亨) Superconducting membrane mechanical oscillator based on vacuum-gap capacitor 2018 Chin. Phys. B 27 060701

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