Theoretical investigation of hierarchical sub-wavelength photonic structures fabricated using high-order waveguide-mode interference lithograph

doi:10.1088/1674-1056/26/2/024202

Abstract This paper presents the theoretical investigation of hierarchical sub-wavelength photonic structures with various periods and numbers of layers, which were fabricated using a high-order waveguide-mode interference field. A 442-nm laser was used to excite high-order waveguide modes in an asymmetric metal-cladding dielectric waveguide structure. The dispersion curve of the waveguide modes was theoretically analyzed, and the distribution of the interference field of high-order waveguide modes was numerically simulated using the finite-element method. The various dependences of the characteristics of hierarchical sub-wavelength photonic structures on the thickness and refractive index of the photoresist and the waveguide mode were investigated in detail. These hierarchical sub-wavelength photonic structures have various periods and numbers of layers and can be fabricated by a simple and low-cost method.

Keywords: sub-wavelength photonic structure finite-element method waveguide modes lithography

Received: 09 September 2016
Revised: 29 October 2016
Accepted manuscript online:

PACS:	42.25.Hz	(Interference)
	42.50.St	(Nonclassical interferometry, subwavelength lithography)
	42.79.Gn	(Optical waveguides and couplers)

Fund: Project supported by the National Natural Science Foundation of China (Grant No. 61505074), the National Key Basic Research Program of China (Grant No. 2013CBA01703), and the HongLiu Young Teachers Training Program Funded Projects of Lanzhou University of Technology (Grant No. Q201509).

Corresponding Authors: Xiangxian Wang
E-mail: wangxx869@126.com

Cite this article:

Ru Wang(王茹), Xiangxian Wang(王向贤), Hua Yang(杨华), Yunping Qi(祁云平) Theoretical investigation of hierarchical sub-wavelength photonic structures fabricated using high-order waveguide-mode interference lithograph 2017 Chin. Phys. B 26 024202

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Theoretical investigation of hierarchical sub-wavelength photonic structures fabricated using high-order waveguide-mode interference lithograph

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