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Chin. Phys. B, 2014, Vol. 23(4): 048102    DOI: 10.1088/1674-1056/23/4/048102
INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY Prev   Next  

Influences of nitrogen flow rate on the structures and properties of Ti and N co-doped diamond-like carbon films deposited by arc ion plating

Zhang Lina b, Ma Guo-Jiab, Lin Guo-Qianga, Ma Heb, Han Ke-Changa
a Key Laboratory for Material Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Dalian 116024, China;
b Science and Technology on Power Beam Processes Laboratory, Beijing Aeronautical ManufacturingTechnology Research Institute, Beijing 100024, China
Abstract  In this paper, Ti-C-N nanocomposite films are deposited under different nitrogen flow rates by pulsed bias arc ion plating using Ti and graphite targets in the Ar/N2 mixture gas. The surface morphologies, compositions, microstructures, and mechanical properties of the Ti-C-N films are investigated systematically by field emission scanning electron microscopy (FE-SEM), x-ray photoelectron spectroscopy (XPS), grazing incident x-ray diffraction (GIXRD), Raman spectra, and nano-indentation. The results show that the nanocrystalline Ti(C,N) phase precipitates in the film from GIXRD and XPS analysis, and Raman spectra prove the presence of diamond-like carbon, indicating the formation of nanocomposite film with microstructures comprising nanocrystalline Ti(C,N) phase embedded into a diamond-like matrix. The nitrogen flow rate has a significant effect on the composition, structure, and properties of the film. The nano-hardness and elastic modulus first increase and then decrease as nitrogen flow rate increases, reaching a maximum of 34.3 GPa and 383.2 GPa, at a nitrogen flow rate of 90 sccm, respectively.
Keywords:  arc ion plating      Ti-C-N film      nitrogen flow rate      microstructure  
Received:  26 July 2013      Revised:  22 September 2013      Accepted manuscript online: 
PACS:  81.15.Jj (Ion and electron beam-assisted deposition; ion plating)  
  68.55.-a (Thin film structure and morphology)  
  68.60.Bs (Mechanical and acoustical properties)  
  61.05.cj (X-ray absorption spectroscopy: EXAFS, NEXAFS, XANES, etc.)  
Fund: Project supported by the National Natural Science Foundation of China (Grant No. 51271047).
Corresponding Authors:  Zhang Lin     E-mail:  linzh1817@gmail.com
About author:  81.15.Jj; 68.55.-a; 68.60.Bs; 61.05.cj

Cite this article: 

Zhang Lin, Ma Guo-Jia, Lin Guo-Qiang, Ma He, Han Ke-Chang Influences of nitrogen flow rate on the structures and properties of Ti and N co-doped diamond-like carbon films deposited by arc ion plating 2014 Chin. Phys. B 23 048102

[1] Zhang G, Li B, Jiang B, Yan F and Chen D 2009 Appl. Surf. Sci. 255 8788
[2] Shafiq M, Hassan M, Shahzad K, Qayyum A, Ahmad S, Rawat R S and Zakaullah M 2010 Chin. Phys. B 19 012801
[3] Cheng Y and Zheng Y F 2007 Surf. Coat. Technol. 201 4909
[4] Lu Y H, Wang J P and Shen Y G 2009 Appl. Surf. Sci. 255 7858
[5] Tsotsos C, Baker M A, Polychronopoulou K, Gibson P N, Giannakopoulos K, Polycarpou A A, Böbel K and Rebholz C 2010 Thin Solid Films 519 24
[6] Martínez-Martínez D, López-Cartes C, Justo A, Fernández A and Sáchez-López J C 2009 Solid State Sci. 11 660
[7] Barshilia H C, Prakash M S, Sridhara Rao D V and Rajam K S 2005 Surf. Coat. Technol. 195 147
[8] Lu Y H and Shen Y G 2007 Appl. Phys. Lett. 90 221913
[9] Chen R, Tu J P, Liu D G, Mai Y J and Gu C D 2011 Surf. Coat. Technol. 205 5228
[10] Lin G Q, Zhao Y H, Guo H M, Wang D Z, Dong C, Huang R F and Wen L S 2004 J. Vac. Sci. Technol. A 22 1218
[11] Zhang M, Lin G Q, Dong C and Wen L S 2007 Acta Phys. Sin. 56 7300 (in Chinese)
[12] Stüber M, Leiste H, Ulrich S, Holleck H and Schild D 2002 Surf. Coat. Technol. 150 218
[13] Zhou F, Adachi K and Kato K 2006 Thin Solid Films 514 231
[14] Guemmaz M, Moraitis G, Mosser A, Khan M A and Parlebas J C 1997 J. Phys.: Condes. Matter 9 8453
[15] Johansson L I, Johansson H I P and Håkansson K L 1993 Phys. Rev. B 48 14520
[16] Wang Q, Zhou F, Zhou Z, Yang Y, Yan C, Wang C, Zhang W J, Li L K Y, Bello I and Lee S T 2012 Surf. Coat. Technol. 206 3777
[17] Levi G, Kaplan W D and Bamberger M 1998 Mater. Lett. 35 344
[18] Robertson J 2002 Mater. Sci. Eng. R 37 129
[19] Chu P K and Li L 2006 Mater. Chem. Phys. 96 253
[20] Zhang S, Zeng X T, Xie H and Hing P 2000 Surf. Coat. Technol. 123 256
[21] Vepřek S and Reiprich S 1995 Thin Solid Films 268 64
[22] Li H K, Lin G Q and Dong C 2010 Acta Phys. Sin. 59 4296 (in Chinese)
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