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Glancing incidence x-ray fluorescence spectrometry based on a single-bounce parabolic capillary |
| Shangkun Shao(邵尚坤)1,2, Huiquan Li(李惠泉)1,2, Tianyu Yuan(袁天语)1,2, Xuepeng Sun(孙学鹏)1,2, Lu Hua(华路)1,2, Zhiguo Liu(刘志国)1,2, and Tianxi Sun(孙天希)1,2,† |
1. Key Laboratory of Beam Technology of the Ministry of Education, College of Nuclear Science and Technology, Beijing Normal University, Beijing 100875, China;
2. Institute of Radiation Technology, Beijing Academy of Science and Technology, Beijing 100875, China |
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Abstract Glancing incidence x-ray fluorescence spectrometry using a single-bounce parabolic capillary is proposed for the analysis of layered samples. The divergence of the x-ray beam was 0.33 mrad. In this paper, we used this instrumental setup to analyze a Si single crystal and a 50 nm HfO2 single-layer film deposited on a Si substrate.
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Received: 27 August 2022
Revised: 10 October 2022
Accepted manuscript online: 19 October 2022
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PACS:
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07.85.Tt
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(X-ray microscopes)
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07.85.Qe
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(Synchrotron radiation instrumentation)
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| Fund: Project supported by the National Key Research and Development Program of China (Grant No.2021YFF0701202), and the National Natural Science Foundation of China(Grant No.11875087). |
Corresponding Authors:
Tianxi Sun
E-mail: stx@bnu.edu.cn
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Cite this article:
Shangkun Shao(邵尚坤), Huiquan Li(李惠泉), Tianyu Yuan(袁天语), Xuepeng Sun(孙学鹏), Lu Hua(华路), Zhiguo Liu(刘志国), and Tianxi Sun(孙天希) Glancing incidence x-ray fluorescence spectrometry based on a single-bounce parabolic capillary 2023 Chin. Phys. B 32 080702
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