Lateral β-Ga2O3 Schottky barrier diode fabricated on (-201) single crystal substrate and its temperature-dependent current-voltage characteristics

doi:10.1088/1674-1056/ac2729

Abstract Lateral β-Ga₂O₃ Schottky barrier diodes (SBDs) each are fabricated on an unintentionally doped (-201) n-type β-Ga₂O₃ single crystal substrate by designing L-shaped electrodes. By introducing sidewall electrodes on both sides of the conductive channel, the SBD demonstrates a high current density of 223 mA/mm and low specific on-resistance of 4.7 mΩ ·cm². Temperature-dependent performance is studied and the Schottky barrier height is extracted to be in a range between 1.3 eV and 1.35 eV at temperatures ranging from 20 ℃ to 150 ℃. These results suggest that the lateral β-Ga₂O₃ SBD has a tremendous potential for future power electronic applications.

Keywords: β -Ga₂O₃ Schottky barrier diodes rectifying ability breakdown voltage

Received: 02 July 2021
Revised: 08 September 2021
Accepted manuscript online: 16 September 2021

PACS:	73.40.Mr	(Semiconductor-electrolyte contacts)
	84.30.Jc	(Power electronics; power supply circuits)
	85.30.De	(Semiconductor-device characterization, design, and modeling)
	85.30.Kk	(Junction diodes)

Fund: Project supported by the National Key Research and Development Program of China (Grant No. 2018YFB2200500), the National Natural Science Foundation of China (Grant Nos. 62050073, 62090054, and 61975196), and the Key Research Program of Frontier Sciences, Chinese Academy of Sciences (Grant No. QYZDY-SSW-JSC022).

Corresponding Authors: Jun Zheng
E-mail: zhengjun@semi.ac.cn

Cite this article:

Pei-Pei Ma(马培培), Jun Zheng(郑军), Ya-Bao Zhang(张亚宝), Xiang-Quan Liu(刘香全), Zhi Liu(刘智), Yu-Hua Zuo(左玉华), Chun-Lai Xue(薛春来), and Bu-Wen Cheng(成步文) Lateral β-Ga₂O₃ Schottky barrier diode fabricated on (-201) single crystal substrate and its temperature-dependent current-voltage characteristics 2022 Chin. Phys. B 31 047302

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Lateral β-Ga2O3 Schottky barrier diode fabricated on (-201) single crystal substrate and its temperature-dependent current-voltage characteristics

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Lateral β-Ga₂O₃ Schottky barrier diode fabricated on (-201) single crystal substrate and its temperature-dependent current-voltage characteristics