Fabrication of Al air-bridge on coplanar waveguide

doi:10.1088/1674-1056/27/10/100310

Abstract

Superconducting coplanar waveguide (CPW) can be widely used as two-dimensional (2D) resonator, transmission line or feedline, providing an important component for superconducting quantum circuit which is a promising candidate for quantum information processing. Due to the discontinuities and asymmetries in the ground planes, CPW usually exhibits the spurious resonance, which is a common source of decoherence in circuit quantum electrodynamics experiments. To mitigate the spurious resonance, we fabricated superconducting aluminum air-bridges on Nb CPW. The fabricated air-bridges are approximately 3 μ high and up to 120 μ long. Compared with other methods, the fabrication procedures of our air-bridges are simpler, and the air-bridge can withstand strong ultrasound.

Keywords: air-bridge fabrication superconducting coplanar waveguide

Received: 04 May 2018
Revised: 21 June 2018
Accepted manuscript online:

PACS:	03.67.Lx	(Quantum computation architectures and implementations)
	42.82.Cr	(Fabrication techniques; lithography, pattern transfer)
	85.25.-j	(Superconducting devices)

Fund:

Project supported by the National Key Research and Development Program of China (Grant No. 2016YFA0301802) and the National Natural Science Foundation of China (Grant Nos. 11474152, 11274156, 11504165, and 61521001).

Corresponding Authors: Hai-Feng Yu
E-mail: hfyu@nju.edu.cn

Cite this article:

Zhen-Chuan Jin(金震川), Hai-Teng Wu(吴海腾), Hai-Feng Yu(于海峰), Yang Yu(于扬) Fabrication of Al air-bridge on coplanar waveguide 2018 Chin. Phys. B 27 100310

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