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Chin. Phys. B, 2016, Vol. 25(11): 118105    DOI: 10.1088/1674-1056/25/11/118105

Large scale fabrication of nitrogen vacancy-embedded diamond nanostructures for single-photon source applications

Qianqing Jiang(姜倩晴)1,4,5, Wuxia Li(李无瑕)1, Chengchun Tang(唐成春)1, Yanchun Chang(常彦春)1,5, Tingting Hao(郝婷婷)1,5, Xinyu Pan(潘新宇)1,2, Haitao Ye(叶海涛)3, Junjie Li(李俊杰)1, Changzhi Gu(顾长志)1,2,5
1 Beijing National Laboratory of Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China;
2 Collaborative Innovation Center of Quantum Matter, Beijing 100190, China;
3 School of Engineering and Applied Science, Aston University, Birmingham B4 7ET, United Kingdom;
4 Beijing National Laboratory for Molecular Sciences, Institute of Chemistry, Chinese Academy of Science, Beijing 100190, China;
5 CAS Key Laboratory of Vacuum Physics, School of Physical Sciences, University of Chinese Academy of Sciences, Beijing 100190, China

Color centers in diamond are prominent candidates for generating and manipulating quantum states of light, even at room temperature. However, the photon collection efficiency of bulk diamond is greatly reduced by refraction at the diamond/air interface. To address this issue, we fabricated arrays of diamond nanostructures, differing in both diameter and top end shape, with HSQ, PMMA, and Cr as the etching mask materials, aiming toward large scale fabrication of single-photon sources with enhanced collection efficiency made of nitrogen vacancy (NV) embedded diamond. With a mixture of O2 and CHF3 gas plasma, diamond pillars with diameters down to 45 nm were obtained. The top end shape evolution has been represented with a simple model. The tests of size dependent single-photon properties confirmed an improved single-photon collection efficiency enhancement, larger than tenfold, and a mild decrease of decoherence time with decreasing pillar diameter was observed as expected. These results provide useful information for future applications of nanostructured diamond as a single-photon source.

Keywords:  large scale fabrication      nitrogen vacancy      diamond      single-photon source  
Received:  24 June 2016      Revised:  15 August 2016      Accepted manuscript online: 
PACS:  81.16.-c (Methods of micro- and nanofabrication and processing)  
  87.85.Rs (Nanotechnologies-applications)  
  81.07.-b (Nanoscale materials and structures: fabrication and characterization)  

Project supported by the National Key Research and Development Plan of China (Grant No. 2016YFA0200402), the National Natural Science Foundation of China (Grants Nos. 11574369, 11574368, 91323304, 11174362, and 51272278), and the FP7 Marie Curie Action (project No. 295208) sponsored by the European Commission.

Corresponding Authors:  Changzhi Gu, Wuxia Li     E-mail:;

Cite this article: 

Qianqing Jiang(姜倩晴), Wuxia Li(李无瑕), Chengchun Tang(唐成春), Yanchun Chang(常彦春), Tingting Hao(郝婷婷), Xinyu Pan(潘新宇), Haitao Ye(叶海涛), Junjie Li(李俊杰), Changzhi Gu(顾长志) Large scale fabrication of nitrogen vacancy-embedded diamond nanostructures for single-photon source applications 2016 Chin. Phys. B 25 118105

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