Influences of hydrogen dilution on microstructure and optical absorption characteristics of nc-SiOx:H film

doi:10.1088/1674-1056/24/10/108102

Abstract By using the plasma enhanced chemical vapor deposition (PECVD) technique, amorphous silicon oxide films containing nanocrystalline silicon grain (nc-SiO_x:H) are deposited, and the bonding configurations and optical absorption properties of the films are investigated. The grain size can be well controlled by varying the hydrogen and oxygen content, and the largest size is obtained when the hydrogen dilution ratio R is 33. The results show that the crystallinity and the grain size of the film first increased and then decreased as R increased. The highest degree of crystallinity is obtained at R=30. The analyses of bonding characteristics and light absorption characteristics show that the incorporation of hydrogen leads to an increase of overall bonding oxygen content in the film, and the film porosity first increases and then decreases. When R=30, the film can be more compact, the optical absorption edge of the film is blue shifted, and the film has a lower activation energy.

Keywords: nc-SiO_x:H microstructure optical absorption

Received: 13 February 2015
Revised: 12 June 2015
Accepted manuscript online:

PACS:	81.07.Bc	(Nanocrystalline materials)
	78.67.Bf	(Nanocrystals, nanoparticles, and nanoclusters)
	71.35.Cc	(Intrinsic properties of excitons; optical absorption spectra)

Fund: Project supported by the Key Basic Research Project of Hebei Province, China (Grant No. 12963930D) and the Natural Science Foundation of Hebei Province, China (Grant Nos. F2013201250 and B2012402011).

Corresponding Authors: Yu Wei
E-mail: yuwei@hbu.edu.cn

Cite this article:

Zhao Wei (赵蔚), Du Lin-Yuan (杜霖元), Jiang Zhao-Yi (蒋昭毅), Yin Chen-Chen (尹辰辰), Yu Wei (于威), Fu Guang-Sheng (傅广生) Influences of hydrogen dilution on microstructure and optical absorption characteristics of nc-SiO_x:H film 2015 Chin. Phys. B 24 108102

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Influences of hydrogen dilution on microstructure and optical absorption characteristics of nc-SiOx:H film

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Influences of hydrogen dilution on microstructure and optical absorption characteristics of nc-SiO_x:H film