Pattern transition from nanohoneycomb to nanograss on germanium by gallium ion bombardment

doi:10.1088/1674-1056/24/5/056801

Abstract During the irradiation of Ge surface with Ga⁺ ions up to 10¹⁷ ions·cm^-2, various patterns from ordered honeycomb to nanograss structure appear to be decided by the ion beam energy. The resulting surface morphologies have been studied by scanning electron microscopy and atomic force microscopy. For high energy Ga⁺ irradiation (16–30 keV), by controlling the ion fluence, we have captured that the equilibrium nanograss morphology also originates from the ordered honeycomb structure. When honeycomb holes are formed by ion erosion, heterogeneous distribution of the deposited energy along the holes leads to viscous flow from the bottom to the plateau. Redistribution of target atoms results in the growth of protuberances on the plateau, and finally the pattern evolution from honeycomb to nanograss with an equilibrium condition.

Keywords: ion beam technology germanium nanopatterns

Received: 01 December 2014
Revised: 30 December 2014
Accepted manuscript online:

PACS:	68.35.bg	(Semiconductors)
	78.55.Mb	(Porous materials)
	68.37.Ps	(Atomic force microscopy (AFM))

Fund: Project Project of Shanghai, China (Grant No. 11PJ1411700), the Hong Kong Research Grants Council (RGC) General Research Funds (GRF), China (Grant No. 112212), the City University of Hong Kong of Hong Kong Applied Research Grant (ARG), China (Grant No. 9667066), and the International Collaboration and Innovation Program on High Mobility Materials Engineering of Chinese Academy of Sciences.

Corresponding Authors: Di Zeng-Feng
E-mail: zfdi@mail.sim.ac.cn

About author: 68.35.bg; 78.55.Mb; 68.37.Ps

Cite this article:

Zheng Xiao-Hu (郑晓虎), Zhang Miao (张苗), Huang An-Ping (黄安平), Xiao Zhi-Song (肖志松), Paul K Chu (朱剑豪), Wang Xi (王曦), Di Zeng-Feng (狄增峰) Pattern transition from nanohoneycomb to nanograss on germanium by gallium ion bombardment 2015 Chin. Phys. B 24 056801

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Pattern transition from nanohoneycomb to nanograss on germanium by gallium ion bombardment

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