CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES |
Prev
Next
|
|
|
Resonance-mode effect on piezoelectric microcantilever performance in air, with a focus on the torsional modes |
Qiu Hua-Cheng (邱华诚)a b, Dara Feilia, Wu Xue-Zhong (吴学忠)b, Helmut Seidela |
a Saarland University, Chair of Micromechanics, Microfluidics/Microactuators, 66123 Saarbrücken, Germany; b National University of Defense Technology, College of Mechanical Engineering and Automation, Changsha 410073, China |
|
|
Abstract A high quality factor is preferred for a microresonator sensor to improve the sensitivity and resolution. In this paper we systematically investigate the performance of the microcantilever in different resonance modes, which are the first three flexural modes, the first lateral mode, and the first and the second torsional modes. An aluminum nitride-based piezoelectric cantilever is fabricated and tested under controlled pressure from an ultra-high vacuum to a normal atmosphere, using a custom-built vacuum chamber. From the experiment results, it can be seen that the torsional modes exhibit better quality factors than those of the flexural and lateral ones. Finally, an analytical model for the air damping characteristics of the torsional mode cantilever is derived and verified by comparing with experimental results.
|
Received: 21 March 2013
Revised: 14 June 2013
Accepted manuscript online:
|
PACS:
|
77.65.Fs
|
(Electromechanical resonance; quartz resonators)
|
|
85.50.-n
|
(Dielectric, ferroelectric, and piezoelectric devices)
|
|
Corresponding Authors:
Qiu Hua-Cheng
E-mail: h.qiu@lmm.uni-saarland.de
|
About author: 77.65.Fs; 85.50.-n |
Cite this article:
Qiu Hua-Cheng (邱华诚), Dara Feili, Wu Xue-Zhong (吴学忠), Helmut Seidel Resonance-mode effect on piezoelectric microcantilever performance in air, with a focus on the torsional modes 2014 Chin. Phys. B 23 027701
|
[1] |
Waggoner P S and Craighead H G 2007 Lab. Chip. 7 1238
|
[2] |
Fadel L, Lochon F, Dufour I and Francais O 2004 J. Micromech. Microeng. 14 23
|
[3] |
Zhao H, Luo W, Zheng H Y, Yang J L and Yang F H 2012 Chin. Phys. B 21 100702
|
[4] |
Jin D Z, Li X X, Zhang Z X, Bao H H, Wang Y L, Liu J and Yu H T 2007 Proceedings of the IEEE 20th International Conference on Micro-electro Mechanical Systems, January 21–25, 2007, Hyoko, Japan, p. 107
|
[5] |
Zhou J, Li P, Zhang S, Huang Y, Yang P, Bao M and Ruan G 2003 Microelectron. Eng. 69 37
|
[6] |
Ababneh A, Schmid U, Hernando J, Sánchez-Rojas J L and Seidel H 2010 Mater. Sci. Eng. B 172 253
|
[7] |
Lübbe J, Schnieder H and Reichling M 2010 Proceedings of the 13th International Conference on Non-Contact Atomic Force Microscopy, July 31–August 4, 2010, Kanazawa, Japan, p. 30
|
[8] |
Xia X and Li X 2008 Rev. Sci. Instrum. 79 074301
|
[9] |
Blom F R, Bouwstra S, Elwenspoek M and Fluitman J H J 1992 J. Vac. Sci. Technol. B 10 19
|
[10] |
Naeli K and Brand O 2009 J. Appl. Phys. 105 014908
|
[11] |
Lu J, Ikehara T, Zhang Y, Mihara T, Itoh T and Maeda R 2008 Proceedings of the Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, April 9–11, 2008, French Riviera, France, p. 60
|
[12] |
Dohn S, Sandberg R, Svendsen W and Boisen A 2005 Appl. Phys. Lett. 86 233501
|
[13] |
Qiu H C, Schwarz P, Feili D, Merzsch S, Peiner E, Wu X Z and Seidel H 2013 Microsyst. Technol. 19 1131
|
[14] |
Qiu H C, Schwarz P, Völlm H, Feili D, Wu X Z and Seidel H 2013 J. Micromech. Microeng. 23 045007
|
[15] |
Zener C 1938 Phys. Rev. 53 90
|
[16] |
Hao Z, Erbil A and Ayazi F 2003 Sens. Actuators A 109 156
|
[17] |
Xie H, Vitard J, Haliyo S and Régnier S 2008 Meas. Sci. Technol. 19 055207
|
[18] |
Green C P and Sader J E 2002 J. Appl. Phys. 92 6262
|
[19] |
Landau L D and Lifshitz E M 2004 Fluid Mechanics, 2nd edn. (Oxford: Elsevier) p. 89
|
[20] |
Burgdorfer A 1959 J. Basic Eng. 81 94
|
[21] |
Hosaka H, Itao K and Kuroda S 1995 Sens. Actuators A 49 87
|
No Suggested Reading articles found! |
|
|
Viewed |
|
|
|
Full text
|
|
|
|
|
Abstract
|
|
|
|
|
Cited |
|
|
|
|
Altmetric
|
blogs
Facebook pages
Wikipedia page
Google+ users
|
Online attention
Altmetric calculates a score based on the online attention an article receives. Each coloured thread in the circle represents a different type of online attention. The number in the centre is the Altmetric score. Social media and mainstream news media are the main sources that calculate the score. Reference managers such as Mendeley are also tracked but do not contribute to the score. Older articles often score higher because they have had more time to get noticed. To account for this, Altmetric has included the context data for other articles of a similar age.
View more on Altmetrics
|
|
|