Resonance-mode effect on piezoelectric microcantilever performance in air, with a focus on the torsional modes

doi:10.1088/1674-1056/23/2/027701

Abstract A high quality factor is preferred for a microresonator sensor to improve the sensitivity and resolution. In this paper we systematically investigate the performance of the microcantilever in different resonance modes, which are the first three flexural modes, the first lateral mode, and the first and the second torsional modes. An aluminum nitride-based piezoelectric cantilever is fabricated and tested under controlled pressure from an ultra-high vacuum to a normal atmosphere, using a custom-built vacuum chamber. From the experiment results, it can be seen that the torsional modes exhibit better quality factors than those of the flexural and lateral ones. Finally, an analytical model for the air damping characteristics of the torsional mode cantilever is derived and verified by comparing with experimental results.

Keywords: microcantilever aluminum nitride torsional mode quality factor

Received: 21 March 2013
Revised: 14 June 2013
Accepted manuscript online:

PACS:	77.65.Fs	(Electromechanical resonance; quartz resonators)
	85.50.-n	(Dielectric, ferroelectric, and piezoelectric devices)

Corresponding Authors: Qiu Hua-Cheng
E-mail: h.qiu@lmm.uni-saarland.de

About author: 77.65.Fs; 85.50.-n

Cite this article:

Qiu Hua-Cheng (邱华诚), Dara Feili, Wu Xue-Zhong (吴学忠), Helmut Seidel Resonance-mode effect on piezoelectric microcantilever performance in air, with a focus on the torsional modes 2014 Chin. Phys. B 23 027701

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Resonance-mode effect on piezoelectric microcantilever performance in air, with a focus on the torsional modes

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