Please wait a minute...
Chin. Phys. B, 2017, Vol. 26(5): 054211    DOI: 10.1088/1674-1056/26/5/054211
ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS Prev   Next  

Silica-based microcavity fabricated by wet etching

H Long(龙浩), W Yang(杨文), L Y Ying(应磊莹), B P Zhang(张保平)
Department of Electronic Engineering, Optoelectronics Engineering Research Center, Xiamen University, Xiamen 361005, China
Abstract  

Silica whispering gallery mode (WGM) microcavities were fabricated by the buffered oxide etcher and potassium hydroxide wet etching technique without any subsequent chemical or laser treatments. The silicon pedestal underneath was an octagonal pyramid, thus providing a pointed connection area with the top silica microdisk while weakly influencing the resonance modes. The sidewalls of our microdisks were wedge shaped, which was believed to be an advantage for the mode confinement. Efficient coupling from and to the 60 μm diameter microdisk structure was achieved using tapered optical fibres, exhibiting a quality factor of 1.5×104 near a wavelength of 1550 nm. Many resonance modes were observed, and double transverse electric modes were identified by theoretical calculations. The quality factor of the microdisks was also analysed to deduce the cavity roughness. The wet etching technique provides a more convenient avenue to fabricate WGM microdisks than conventional fabrication methods.

Keywords:  whispering gallery mode      wet etching      quality factor  
Received:  23 December 2016      Revised:  21 January 2017      Accepted manuscript online: 
PACS:  42.55.Sa (Microcavity and microdisk lasers)  
  42.70.Ce (Glasses, quartz)  
Fund: 

Project supported by the Postdoctoral Science Foundation of China (Grant No. 2015M582041) and the Special Project on the Integration of Industry, Education and Research of Aviation Industry Corporation of China.

Corresponding Authors:  B P Zhang     E-mail:  bzhang@xmu.edu.cn

Cite this article: 

H Long(龙浩), W Yang(杨文), L Y Ying(应磊莹), B P Zhang(张保平) Silica-based microcavity fabricated by wet etching 2017 Chin. Phys. B 26 054211

[1] Yang S C, Wang Y and Sun H D 2015 Adv. Opt. Mats. 3 1136
[2] Foreman M R, Swaim J D and Vollmer F 2015 Adv. Opt. Photonics 7 168
[3] McCall S L, Levi A F J, Slusher R E and Pearton S J 1992 Appl. Phys. Lett. 60 289
[4] Little B E, Chu S T, Haus H A, Foresi J and Laine J P 1997 IEEE J. Lightwave Technol. 15 998
[5] Wang S J, Huang Y H, Yang Y D, Hu Y H, Xiao J L and Yun D 2010 Chin. Phys. Lett. 27 014213
[6] Li W F, Du J J, Wen R J, Yang P F, Li G and Zhang T C 2014 Acta Phys. Sin. 63 244205 (in Chinese)
[7] Li C R, Dai S X, Zhang Q Y, Shen X, Wang X S, Zhang P Q, Lu L W, Wu Y H and Lv S Q 2015 Chin. Phys. B 24 044208
[8] Kippenberg T J, Spillane S M, Armani D K and Vahala K J 2003 Appl. Phys. Lett. 83 797
[9] Xia J S, Ikegami Y, Nemoto K and Shiraki Y 2007 Appl. Phys. Lett. 90 141102
[10] Pan J S, Cheng P H, Lee T D, Lai Y and Tai K 1998 Jpn. J. Appl. Phys. 37 L643
[11] Lin J T, Xu Y X, Tang J L, Wang N W, Song J X, He F, Fang W and Cheng Y 2014 Appl. Phys. A 116 2019
[12] Gayral B, Gerard J M, Lemaitre A, Dupuis C and Manin L 1999 Appl. Phys. Lett. 75 13
[13] Zhang Z Y, Yang L, Liu V, Hong T, Vahala K and Scherer A 2007 Appl. Phys. Lett. 90 111119
[14] Ning Y Q and Wang L J 1998 Phot. China 3547 164
[15] Zhu J G, Ozdemir S K, Xiao Y F, Li L, He L, Chen D R and Yang L 2010 Nat. Photon. 4 46
[16] Kippenberg T J, Spillane S M and Vahala K J 2004 Appl. Phys. Lett. 85 6113
[17] Armani D K, Kippenberg T J, Spillane S M and Vahala K J 2003 Nature 421 925
[18] Shi S Y, Prather D W, Yang L Q and Kolodzey J 2003 Opt. Eng. 42 383
[19] Bo F, Wang X O, Li Y, Gao F, Zhang G Q and Xu J J 2015 Sci. China-Phys. Mech. Astron. 58 114207
[20] Khanaliloo B, Mitchell M, Hryciw A C and Barclay P E 2015 Nano Lett. 15 5131
[21] Matsko A B and Ilchenko V S 2006 IEEE Journal of Selected Topics in Quantum Electronics 12 3
[22] Monteiro T S, Kastytis P, Goncalves L M, Minas G and Cardoso S 2015 Micromachines 6 1534
[23] Zervas M N, Murugan G S and Wilkinson J S 2018 International Conference on Transparent Optical Networks (ICTON) 2008 Invited paper
[24] Braginsky V B, Gorodetsky M L and Ilchenko V S 1989 Phys. Lett. A 137 393
[25] Gorodetsky M L, Savchenkov A A and Ilchenko V S 1996 Opt. Lett. 21 453
[1] Physical analysis of normally-off ALD Al2O3/GaN MOSFET with different substrates using self-terminating thermal oxidation-assisted wet etching technique
Cheng-Yu Huang(黄成玉), Jin-Yan Wang(王金延), Bin Zhang(张斌), Zhen Fu(付振), Fang Liu(刘芳), Mao-Jun Wang(王茂俊), Meng-Jun Li(李梦军), Xin Wang(王鑫), Chen Wang(汪晨), Jia-Yin He(何佳音), and Yan-Dong He(何燕冬). Chin. Phys. B, 2022, 31(9): 097401.
[2] Design of a low-frequency miniaturized piezoelectric antenna based on acoustically actuated principle
Yong Zhang(张勇), Zhong-Ming Yan(严仲明), Tian-Hao Han(韩天浩), Shuang-Shuang Zhu(朱双双), Yu Wang(王豫), and Hong-Cheng Zhou(周洪澄). Chin. Phys. B, 2022, 31(7): 077702.
[3] Wet etching and passivation of GaSb-based very long wavelength infrared detectors
Xue-Yue Xu(许雪月), Jun-Kai Jiang(蒋俊锴), Wei-Qiang Chen(陈伟强), Su-Ning Cui(崔素宁), Wen-Guang Zhou(周文广), Nong Li(李农), Fa-Ran Chang(常发冉), Guo-Wei Wang(王国伟), Ying-Qiang Xu(徐应强), Dong-Wei Jiang(蒋洞微), Dong-Hai Wu(吴东海), Hong-Yue Hao(郝宏玥), and Zhi-Chuan Niu(牛智川). Chin. Phys. B, 2022, 31(6): 068503.
[4] A high-quality-factor ultra-narrowband perfect metamaterial absorber based on monolayer molybdenum disulfide
Liying Jiang(蒋黎英), Yingting Yi(易颖婷), Yijun Tang(唐轶峻), Zhiyou Li(李治友),Zao Yi(易早), Li Liu(刘莉), Xifang Chen(陈喜芳), Ronghua Jian(简荣华),Pinghui Wu(吴平辉), and Peiguang Yan(闫培光). Chin. Phys. B, 2022, 31(3): 038101.
[5] Raman lasing and other nonlinear effects based on ultrahigh-Q CaF2 optical resonator
Tong Xing(邢彤), Enbo Xing(邢恩博), Tao Jia(贾涛), Jianglong Li(李江龙), Jiamin Rong(戎佳敏), Yanru Zhou(周彦汝), Wenyao Liu(刘文耀), Jun Tang(唐军), and Jun Liu(刘俊). Chin. Phys. B, 2022, 31(10): 104204.
[6] Fabrication of microresonators by using photoresist developer as etchant
Shu-Qing Song(宋树清), Jian-Wen Xu(徐建文), Zhi-Kun Han(韩志坤), Xiao-Pei Yang(杨晓沛), Yu-Ting Sun(孙宇霆), Xiao-Han Wang(王晓晗), Shao-Xiong Li(李邵雄), Dong Lan(兰栋), Jie Zhao(赵杰), Xin-Sheng Tan(谭新生), and Yang Yu(于扬). Chin. Phys. B, 2021, 30(6): 060313.
[7] High-efficiency photon-electron coupling resonant emission in GaN-based microdisks on Si
Menghan Liu(刘梦涵), Peng Chen(陈鹏), Zili Xie(谢自力), Xiangqian Xiu(修向前), Dunjun Chen(陈敦军), Bin Liu(刘斌), Ping Han(韩平), Yi Shi(施毅), Rong Zhang(张荣), Youdou Zheng(郑有炓), Kai Cheng(程凯), Liyang Zhang(张丽阳). Chin. Phys. B, 2020, 29(8): 084203.
[8] Analysis of iris-loaded resonance cavity in miniaturized maser
Zu-Gen Guo(郭祖根), Yong Zhang(张勇), Tao Tang(唐涛), Zhan-Liang Wang(王战亮), Yu-Bin Gong(宫玉彬), Fei Xiao(肖飞), Hua-Rong Gong(巩华荣). Chin. Phys. B, 2020, 29(5): 050601.
[9] Coupled resonator-induced transparency on a three-ring resonator
Xinquan Jiao(焦新泉), Haobo Yu(于皓博), Miao Yu(于淼), Chenyang Xue(薛晨阳), Yongfeng Ren(任勇峰). Chin. Phys. B, 2018, 27(7): 074212.
[10] Fabrication and characterization of Ge–Ga–Sb–S glass microsphere lasers operating at~1.9 μm
Kun Yang(杨坤), Shixun Dai(戴世勋), Yuehao Wu(吴越豪), Qiuhua Nie(聂秋华). Chin. Phys. B, 2018, 27(11): 117701.
[11] High quality factor superconducting coplanar waveguide fabricated with TiN
Qiang Liu(刘强), Guang-Ming Xue(薛光明), Xin-Sheng Tan(谭新生), Hai-Feng Yu(于海峰), Yang Yu(于扬). Chin. Phys. B, 2017, 26(5): 058402.
[12] Self-aligned-gate AlGaN/GaN heterostructure field-effect transistor with titanium nitride gate
Jia-Qi Zhang(张家琦), Lei Wang(王磊), Liu-An Li(李柳暗), Qing-Peng Wang(王青鹏), Ying Jiang(江滢), Hui-Chao Zhu(朱慧超), Jin-Ping Ao(敖金平). Chin. Phys. B, 2016, 25(8): 087308.
[13] Microwave interrogation cavity for the rubidium space cold atom clock
Wei Ren(任伟), Yuan-Ci Gao(高源慈), Tang Li(李唐), De-Sheng Lü(吕德胜), Liang Liu(刘亮). Chin. Phys. B, 2016, 25(6): 060601.
[14] Low threshold fiber taper coupled rare earth ion-doped chalcogenide microsphere laser
Li Chao-Ran (李超然), Dai Shi-Xun (戴世勋), Zhang Qin-Yuan (张勤远), Shen Xiang (沈祥), Wang Xun-Si (王训四), Zhang Pei-Qing (张培晴), Lu Lai-Wei (路来伟), Wu Yue-Hao (吴越豪), Lv She-Qin (吕社钦). Chin. Phys. B, 2015, 24(4): 044208.
[15] Improvement in a-plane GaN crystalline quality using wet etching method
Cao Rong-Tao (曹荣涛), Xu Sheng-Rui (许晟瑞), Zhang Jin-Cheng (张进成), Zhao Yi (赵一), Xue Jun-Shuai (薛军帅), Ha Wei (哈微), Zhang Shuai (张帅), Cui Pei-Shui (崔培水), Wen Hui-Juan (温慧娟), Chen Xing (陈兴). Chin. Phys. B, 2014, 23(4): 047804.
No Suggested Reading articles found!