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Chin. Phys. B, 2013, Vol. 22(9): 097401    DOI: 10.1088/1674-1056/22/9/097401
CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES Prev   Next  

Fabrication of rhenium Josephson junctions

Xue Guang-Ming (薛光明), Yu Hai-Feng (于海峰), Tian Ye (田野), Liu Wei-Yang (刘伟洋), Yu Hong-Wei (于洪伟), Ren Yu-Feng (任育峰), Zhao Shi-Ping (赵士平)
Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
Abstract  Rhenium is a superconductor with a relatively weak tendency to oxidize, which is advantageous in superconducting quantum circuit and qubit applications. In this work, Re/Al-AlOx/Re Josephson tunnel junctions were fabricated using a selective film-etching process similar to that developed in Nb trilayer technology. The Re films had a superconducting transition temperature of 4.8 K and a transition width of 0.2 K. The junctions were found to be highly reproducible using the fabrication process and their characteristics had good quality with a low leakage current and showed a superconducting gap of 0.55 meV.
Keywords:  Re Josephson junctions      trilayer process      qubit application  
Received:  29 March 2013      Revised:  14 May 2013      Accepted manuscript online: 
PACS:  74.50.+r (Tunneling phenomena; Josephson effects)  
  74.78.-w (Superconducting films and low-dimensional structures)  
  85.25.Cp (Josephson devices)  
Fund: Project supported by the National Natural Science Foundation of China (Grant Nos. 11104340 and 11104332) and the Ministry of Science and Technology of China (Grant Nos. 2009CB929102 and 2011CBA00106).
Corresponding Authors:  Zhao Shi-Ping     E-mail:  spzhao@iphy.ac.cn

Cite this article: 

Xue Guang-Ming (薛光明), Yu Hai-Feng (于海峰), Tian Ye (田野), Liu Wei-Yang (刘伟洋), Yu Hong-Wei (于洪伟), Ren Yu-Feng (任育峰), Zhao Shi-Ping (赵士平) Fabrication of rhenium Josephson junctions 2013 Chin. Phys. B 22 097401

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