CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES |
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Fabrication of rhenium Josephson junctions |
Xue Guang-Ming (薛光明), Yu Hai-Feng (于海峰), Tian Ye (田野), Liu Wei-Yang (刘伟洋), Yu Hong-Wei (于洪伟), Ren Yu-Feng (任育峰), Zhao Shi-Ping (赵士平) |
Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China |
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Abstract Rhenium is a superconductor with a relatively weak tendency to oxidize, which is advantageous in superconducting quantum circuit and qubit applications. In this work, Re/Al-AlOx/Re Josephson tunnel junctions were fabricated using a selective film-etching process similar to that developed in Nb trilayer technology. The Re films had a superconducting transition temperature of 4.8 K and a transition width of 0.2 K. The junctions were found to be highly reproducible using the fabrication process and their characteristics had good quality with a low leakage current and showed a superconducting gap of 0.55 meV.
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Received: 29 March 2013
Revised: 14 May 2013
Accepted manuscript online:
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PACS:
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74.50.+r
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(Tunneling phenomena; Josephson effects)
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74.78.-w
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(Superconducting films and low-dimensional structures)
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85.25.Cp
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(Josephson devices)
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Fund: Project supported by the National Natural Science Foundation of China (Grant Nos. 11104340 and 11104332) and the Ministry of Science and Technology of China (Grant Nos. 2009CB929102 and 2011CBA00106). |
Corresponding Authors:
Zhao Shi-Ping
E-mail: spzhao@iphy.ac.cn
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Cite this article:
Xue Guang-Ming (薛光明), Yu Hai-Feng (于海峰), Tian Ye (田野), Liu Wei-Yang (刘伟洋), Yu Hong-Wei (于洪伟), Ren Yu-Feng (任育峰), Zhao Shi-Ping (赵士平) Fabrication of rhenium Josephson junctions 2013 Chin. Phys. B 22 097401
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