Please wait a minute...
Chin. Phys. B, 2012, Vol. 21(6): 066101    DOI: 10.1088/1674-1056/21/6/066101
CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES Prev   Next  

Evolution of the structural and optical properties of silver oxide films with different stoichiometries deposited by direct-current magnetron reactive sputtering

Zhao Meng-Ke(赵孟珂)a), Liang Yan(梁艳)b), Gao Xiao-Yong(郜小勇)a), Chen Chao(陈超)a), Chen Xian-Mei(陈先梅)a), and Zhao Xian-Wei(赵显伟)a)
a. Key Laboratory of Material Physics (Ministry of Education), School of Physics and Engineering,Zhengzhou University, Zhengzhou 450052, China;
b. College of Information Science and Engineering, Henan University of Technology, Zhengzhou 450001, China
Abstract  Nitrogen doping of silver oxide (AgxO) film is necessary for its application in transparent conductive film and diodes because intrinsic AgxO film is a p-type semiconductor with poor conductivity. In this work, a series of AgxO films is deposited on glass substrates by direct-current magnetron reactive sputtering at different flow ratios (FRs) of nitrogen to O2. Evolutions of the structure, the reflectivity, and the transmissivity of the film are studied by X-ray diffractometry and sphectrophotometry, respectively. The specular transmissivity and the specular reflectivity of the film decreasing with FR increasing can be attributed to the evolution of the phase structure of the film. The nitrogen does not play the role of an acceptor dopant in the film deposition.
Keywords:  silver oxide film      nitrogen doping      optical properties      magnetron reactive sputtering  
Received:  28 September 2011      Revised:  25 October 2011      Accepted manuscript online: 
PACS:  61.05.cp (X-ray diffraction)  
  78.66.-w (Optical properties of specific thin films)  
  81.15.Cd (Deposition by sputtering)  
Fund: Project supported by the National Natural Science Foundation of China (Grant No. 60807001), the Foundation of Henan Educational Committee, China (Grant No. 2010A140017), the College Young Teachers Program of Henan Province and the Graduate Innovation Fund of Zhengzhou University (Grant No. 11L10102).
Corresponding Authors:  Gao Xiao-Yong     E-mail:  xygao@zzu.edu.cn

Cite this article: 

Zhao Meng-Ke(赵孟珂), Liang Yan(梁艳), Gao Xiao-Yong(郜小勇), Chen Chao(陈超), Chen Xian-Mei(陈先梅), and Zhao Xian-Wei(赵显伟) Evolution of the structural and optical properties of silver oxide films with different stoichiometries deposited by direct-current magnetron reactive sputtering 2012 Chin. Phys. B 21 066101

[1] B點hel D, Mihalcea C, Fukaya T, Atoda N, Tominaga J, Kikukawa T and Fuji H 2001 Appl. Phys. Lett. 79 620
[2] Standke B and Jansen M 1986 Angew. Chem. Int. Ed. 25 77
[3] Mansour A N 1990 J. Phys. Chem. 94 1006
[4] Pierson J F, Wiederkehr D and Billard A 2005 Thin Solid Films 478 196
[5] Rivers S B, Bernhardt G, Wright M W, Frankel D J, Steeves M M and Lad R J 2007 Thin Solid Films 515 8684
[6] Fortin E and Weichman F L 1964 Phys. Status Solidi 5 515
[7] Varkey A J and Fort A F 1993 Sol. Energy Matt. Sol. Cells 29 253
[8] Tominaga J 2003 J. Phys: Condens. Matter. 15 1101
[9] Chiu Y, Rambabu U, Hsu M H, Shieh H P D, Chen C Y and Lin H H 2003 J. Appl. Phys. 94 1996
[10] Kim J, Fuji H, Yamakama Y, Nakano T, B點hel D, Tominaga J and Atoda N 2001 Jpn. J. Appl. Phys. 40 1634
[11] Lu Z C, Gu Y J, Yang J X, Li Z S, Ruan W D, Xu W Q, Zhao C and Zhao B 2008 Vib. Spectrosc. 47 99
[12] Gao X Y, Feng H L, Zhang Z Y, Ma J M and Lu J X 2010 Chin. Phys. Lett. 27 026804
[13] Gao X Y, Feng H L, Zhang Z Y, Ma J M, Zhao M K, Chen C, Gu J H, Yang S E, Chen Y S and Lu J X 2011 J. Korean Phys. Soc. 58 243
[14] Gao X Y, Zhang Z Y, Ma J M, Lu J X, Gu J H and Yang S E 2011 Chin. Phys. B 20 026103
[15] Zhang Z Y, Gao X Y, Feng H L, Ma J M and Lu J X 2011 Acta Phys. Sin. 60 016110 (in Chinese)
[16] Zhang Z Y, Gao X Y, Feng H L, Ma J M and Lu J X 2011 Acta Phys. Sin. 60 036107 (in Chinese)
[17] Gao X Y, Feng H L, Ma J M, Zhang Z Y, Lu J X, Chen Y S, Yang S E and Gu J H 2010 Physica B 405 1922
[18] Gao X Y, Feng H L, Ma J M and Zhang Z Y 2010 Chin. Phys. B 19 090701
[1] Optical and electrical properties of BaSnO3 and In2O3 mixed transparent conductive films deposited by filtered cathodic vacuum arc technique at room temperature
Jian-Ke Yao(姚建可) and Wen-Sen Zhong(钟文森). Chin. Phys. B, 2023, 32(1): 018101.
[2] Nonlinear optical properties in n-type quadruple δ-doped GaAs quantum wells
Humberto Noverola-Gamas, Luis Manuel Gaggero-Sager, and Outmane Oubram. Chin. Phys. B, 2022, 31(4): 044203.
[3] Tunable electronic properties of GaS-SnS2 heterostructure by strain and electric field
Da-Hua Ren(任达华), Qiang Li(李强), Kai Qian(钱楷), and Xing-Yi Tan(谭兴毅). Chin. Phys. B, 2022, 31(4): 047102.
[4] Tailoring the optical and magnetic properties of La-BaM hexaferrites by Ni substitution
Hafiz T. Ali, M. Ramzan, M Imran Arshad, Nicola A. Morley, M. Hassan Abbas, Mohammad Yusuf, Atta Ur Rehman, Khalid Mahmood, Adnan Ali, Nasir Amin, and M. Ajaz-un-Nabi. Chin. Phys. B, 2022, 31(2): 027502.
[5] First-principles study of structural and opto-electronic characteristics of ultra-thin amorphous carbon films
Xiao-Yan Liu(刘晓艳), Lei Wang(王磊), and Yi Tong(童祎). Chin. Phys. B, 2022, 31(1): 016102.
[6] Analysis of properties of krypton ion-implanted Zn-polar ZnO thin films
Qing-Fen Jiang(姜清芬), Jie Lian(连洁), Min-Ju Ying(英敏菊), Ming-Yang Wei(魏铭洋), Chen-Lin Wang(王宸琳), and Yu Zhang(张裕). Chin. Phys. B, 2021, 30(9): 097801.
[7] Stability of liquid crystal systems doped with γ-Fe2O3 nanoparticles
Xu Zhang(张旭), Ningning Liu(刘宁宁), Zongyuan Tang(唐宗元), Yingning Miao(缪应宁), Xiangshen Meng(孟祥申), Zhenghong He(何正红), Jian Li(李建), Minglei Cai(蔡明雷), Tongzhou Zhao(赵桐州), Changyong Yang(杨长勇), Hongyu Xing(邢红玉), and Wenjiang Ye(叶文江). Chin. Phys. B, 2021, 30(9): 096101.
[8] Strain-tunable electronic and optical properties of h-BN/BC3 heterostructure with enhanced electron mobility
Zhao-Yong Jiao(焦照勇), Yi-Ran Wang(王怡然), Yong-Liang Guo(郭永亮), and Shu-Hong Ma(马淑红). Chin. Phys. B, 2021, 30(7): 076801.
[9] Gas sensor using gold doped copper oxide nanostructured thin films as modified cladding fiber
Hussein T. Salloom, Rushdi I. Jasim, Nadir Fadhil Habubi, Sami Salman Chiad, M Jadan, and Jihad S. Addasi. Chin. Phys. B, 2021, 30(6): 068505.
[10] Effects of substitution of group-V atoms for carbon or silicon atoms on optical properties of silicon carbide nanotubes
Ying-Ying Yang(杨莹莹), Pei Gong(龚裴), Wan-Duo Ma(马婉铎), Rui Hao(郝锐), and Xiao-Yong Fang(房晓勇). Chin. Phys. B, 2021, 30(6): 067803.
[11] Low-dimensional phases engineering for improving the emission efficiency and stability of quasi-2D perovskite films
Yue Wang(王月), Zhuang-Zhuang Ma(马壮壮), Ying Li(李营), Fei Zhang(张飞), Xu Chen(陈旭), and Zhi-Feng Shi (史志锋). Chin. Phys. B, 2021, 30(6): 067802.
[12] Determination of charge-compensated C3v (II) centers for Er 3+ ions in CdF2 and CaF2 crystals
Rui-Peng Chai(柴瑞鹏), Dan-Hui Hao(郝丹辉), Dang-Li Gao(高当丽), and Qing Pang(庞庆). Chin. Phys. B, 2021, 30(3): 037601.
[13] Optical properties of several ternary nanostructures
Xiao-Long Tang(唐小龙), Xin-Lu Cheng(程新路), Hua-Liang Cao(曹华亮), and Hua-Dong Zeng(曾华东). Chin. Phys. B, 2021, 30(1): 017803.
[14] Structural and optical characteristic features of RF sputtered CdS/ZnO thin films
Ateyyah M Al-Baradi, Fatimah A Altowairqi, A A Atta, Ali Badawi, Saud A Algarni, Abdulraheem S A Almalki, A M Hassanien, A Alodhayb, A M Kamal, M M El-Nahass. Chin. Phys. B, 2020, 29(8): 080702.
[15] Effects of built-in electric field and donor impurity on linear and nonlinear optical properties of wurtzite InxGa1-xN/GaN nanostructures
Xiao-Chen Yang(杨晓晨), Yan Xing(邢雁). Chin. Phys. B, 2020, 29(8): 087802.
No Suggested Reading articles found!