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Chinese Physics, 2001, Vol. 10(13): 174-178    DOI:
ATOMIC AND MOLECULAR PHYSICS Prev   Next  

DIAMOND MICRO- AND NANOSTRUCTURING BY ACCELERATED CLUSTER EROSION

C. Becker, J. Gspann, R. KrÄmer, Y. Yamaguchi
Universität Karlsruhe und Forschungszentrum Karlsruhe, Institut für Mikrostrukturtechnik, Postfach 3640, D-76021 Karlsruhe, Germany
Abstract  Reactive accelerated cluster erosion (RACE) has been used for direct micro- and nanostructuring of bulk diamond. Carbondioxide nanoparticles of about 1000 molecules are accelerated to 100keV energy in order to erode a staircase structure or a toothed wheel into diamond by using appropriate movable or fixed masks. Non-reactive erosion by argon clusters is slower but more effectively polishing. Large-scale molecular dynamics simulations show the nanoparticle impacts to lead to transient craters which relax to a very smooth surface via collective elastic recovery. The enhanced or reduced erosion of the respective cluster material is illuminated.
Keywords:  cluster impact      nano-structuring      molecular dynamics simulation  
Received:  28 March 2001      Accepted manuscript online: 
PACS:  3450D  
  3640J  
  6185  
Fund: Project supported by the Grant-in-Aid for JSPS Fellows (Grant No. 11-08826) from the Ministry of Education, Science, Sports and Culture, Japan.

Cite this article: 

C. Becker, J. Gspann, R. KrÄmer, Y. Yamaguchi DIAMOND MICRO- AND NANOSTRUCTURING BY ACCELERATED CLUSTER EROSION 2001 Chinese Physics 10 174

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