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Chinese Physics, 2001, Vol. 10(13): 167-173    DOI:
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PIEZOELECTRIC Pb(Zr, Ti)O3 MICRO-DEVICES FOR SCANNING FORCE MICROSCOPY AND ULTRA-DENSITY DATA STORAGE

Chu Jia-ru (褚家如)a, Huang Wen-hao (黄文浩)a, R. Maeda (前田龙太郎)b, T. Itoh (伊藤寿浩)c, T. Suga (须贺唯知)c
a Department of Precision Machinery and Instrumentation, University of Science and Technology of China, Hefei 230026, China; b National Institute of Advanced Industrial Science and Technology, Namiki 1-2, Tsukuba, Ibaraki, Japan; c Department of Precision Engineering, the University of Tokyo, Tokyo, Japan
Abstract  In this paper we report two types of micro devices based on Pb(Zr, Ti)O3 (PZT) thin films for improving the throughput of scanning force microscopy (SFM) or data storage using SFM. One is a piezoelectric cantilever array integrated with force sensor as well as z-actuator on each cantilever for parallel operation. The 125-μm-long PZT micro cantilever with a natural resonant frequency of 189 kHz has a high actuation sensitivity of 75 nm/V. Independent parallel images using two cantilevers of the array were obtained. The other is a novel micro-SFM device that is expected to replace the cantilever, the deflection detection unit, and the macro-fabricated scanner which is the bottle neck limiting the single probe acquisition rate. The bridge-structured device has shown a microscopy sensitivity of 0.32 nA/nm in vertical direction and actuation abilities of 70-80nm/±V in the lateral direction.
Keywords:  scanning force microscopy      piezoelectric microdevice      ultra density data storage  
Received:  28 March 2001      Accepted manuscript online: 
PACS:  0779  
  7760  
  9365  

Cite this article: 

Chu Jia-ru (褚家如), Huang Wen-hao (黄文浩), R. Maeda (前田龙太郎), T. Itoh (伊藤寿浩), T. Suga (须贺唯知) PIEZOELECTRIC Pb(Zr, Ti)O3 MICRO-DEVICES FOR SCANNING FORCE MICROSCOPY AND ULTRA-DENSITY DATA STORAGE 2001 Chinese Physics 10 167

[1] ULTRAHIGH DATA DENSITY STORAGE WITH SCANNING TUNNELING MICROSCOPY
Gao Hong-jun (高鸿钧), Shi Dong-xia (时东霞), Zhang Hao-xu (张昊旭), Lin Xiao (林晓). Chin. Phys. B, 2001, 10(13): 179-185.
[2] FOURIER ANALYSIS OF TEMPORAL AND SPATIAL OSCILLATIONS OF TUNNELING CURRENT IN SCANNING TUNNELING MICROSCOPY
Xie Fang-qing (谢仿卿), S. Molitor, Th. Koch, P. von Blanckenhagen. Chin. Phys. B, 2001, 10(13): 19-26.
[3] SETUP AND APPLICATION OF SCANNING NEAR-FIELD OPTICAL MICROSCOPY
Xu Shi-fa (许世发), Zhu Xing (朱星), Zhou He-tian (周赫田), Shen Yu-min (沈玉民), Fei Teng (费滕), Zhang Yu (张宇), Yin Yan (尹彦), Zhang Bei (张蓓), Dai Lun (戴伦), Liu Xiao-ling (刘晓玲), Hu Jian-cheng (胡建成), Lu Ping (卢萍), Zhai Zhong-he (翟中和). Chin. Phys. B, 2001, 10(13): 195-205.
[4] ADSORPTION BEHAVIOR OF AMINO ACIDS ON COPPER SURFACES
Zhao Xue-ying (赵学应), Wang Hao (王浩), Yan Hao (晏浩), Gai Zheng (盖铮), Zhao Ru-guang (赵汝光), Yang Wei-sheng (杨威生). Chin. Phys. B, 2001, 10(13): 84-95.
[5] OBSERVATION OF ACTIN POLYMERISATION WITH ATOMIC FORCE MICROSCOPY
M. Gr?ger. Chin. Phys. B, 2001, 10(13): 96-99.
[6] MANIPULATION OF ATOMS, MOLECULES AND CLUSTERS FOR CONSTRUCTION OF NANOSYSTEMS
F. Moresco, S.W. Hla, J. Repp, K.-F. Braun, S. F?lsch, G. Meyer, K. H. Rieder. Chin. Phys. B, 2001, 10(13): 10-18.
[7] NANOBUBBLES AT THE LIQUID/SOLID INTERFACE STUDIED BY ATOMIC FORCE MICROSCOPY
Lou Shi-tao (楼柿涛), Gao Jian-xia (高剑侠), Xiao Xu-dong (萧旭东), Li Xiao-jun (李晓军), Li Guang-lai (李光来), Zhang Yi (张益), Li Min-qian (李民乾), Sun Jie-lin (孙洁林), Hu Jun (胡均). Chin. Phys. B, 2001, 10(13): 108-110.
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