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Two-dimensional electron gas characteristics of InP-based high electron mobility transistor terahertz detector |
| Jin-Lun Li(李金伦)1,2, Shao-Hui Cui(崔少辉)1, Jian-Xing Xu(徐建星)2,4, Xiao-Ran Cui(崔晓然)2,5, Chun-Yan Guo(郭春妍)2,6, Ben Ma(马奔)2,3, Hai-Qiao Ni(倪海桥)2,3, Zhi-Chuan Niu(牛智川)2,3 |
1. Department of Missile Engineering, Shijiazhuang Campus, Army Engineering University, Shijiazhuang 050003, China;
2. State Key Laboratory for Superlattices, Institute of Semiconductors, Chinese Academy of Sciences(CAS), Beijing 100083, China;
3. College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China;
4. Microsystem & Terahertz Research Center, China Academy of Engineering Physics, Chengdu 610200, China;
5. Wide Bandgap Semiconductor Technology Disciplines State Key Laboratory, Xidian University, Xi'an 710071, China;
6. Key Laboratory of Ultra-fast Photoelectric Diagnostics Technology of Chinese Academy of Sciences, Xi'an Institute of Optics and Precision Mechanics, Xi'an 710119, China |
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Abstract The samples of InxGa1-xAs/In0.52Al0.48As two-dimensional electron gas (2DEG) are grown by molecular beam epitaxy (MBE). In the sample preparation process, the In content and spacer layer thickness are changed and two kinds of methods, i.e., contrast body doping and δ-doping are used. The samples are analyzed by the Hall measurements at 300 K and 77 K. The InxGa1-xAs/In0.52Al0.48As 2DEG channel structures with mobilities as high as 10289 cm2/V·(300 K) and 42040 cm2/V·(77 K) are obtained, and the values of carrier concentration (Nc) are 3.465×1012/cm2 and 2.502×1012/cm2, respectively. The THz response rates of InP-based high electron mobility transistor (HEMT) structures with different gate lengths at 300 K and 77 K temperatures are calculated based on the shallow water wave instability theory. The results provide a reference for the research and preparation of InP-based HEMT THz detectors.
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Received: 01 December 2017
Revised: 24 December 2017
Accepted manuscript online:
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PACS:
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71.10.Ca
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(Electron gas, Fermi gas)
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73.40.Kp
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(III-V semiconductor-to-semiconductor contacts, p-n junctions, and heterojunctions)
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81.05.Ea
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(III-V semiconductors)
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| Fund: Project supported by the Foundation for Scientific Instrument and Equipment Development, Chinese Academy of Sciences (Grant No. YJKYYQ20170032) and the National Natural Science Foundation of China (Grant No. 61435012). |
Corresponding Authors:
Hai-Qiao Ni
E-mail: nihq@semi.ac.cn
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Cite this article:
Jin-Lun Li(李金伦), Shao-Hui Cui(崔少辉), Jian-Xing Xu(徐建星), Xiao-Ran Cui(崔晓然), Chun-Yan Guo(郭春妍), Ben Ma(马奔), Hai-Qiao Ni(倪海桥), Zhi-Chuan Niu(牛智川) Two-dimensional electron gas characteristics of InP-based high electron mobility transistor terahertz detector 2018 Chin. Phys. B 27 047101
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| [1] |
Cao J C 2012 Semiconductor terahertz sources, detectors and applications (Beijing:Science Press) p. 1(in Chinese)
|
| [2] |
Xu J X, Li J L, Wei S H, Ma B, Zhang Y, Zhang Y, Ni H Q and Niu Z C 2017 Chin. Phys. B 26 088702
|
| [3] |
Qin H, Huang Y D, Sun J D, Zhang Z P, Yu Y, Li X and Sun Y F 2017 Chin. Opt. 10 51
|
| [4] |
Sizov F, Rogalski A 2010 Prog. Quantum Electron. 34 278
|
| [5] |
Dyakonov M, Shur M 1993 Phys. Rev. Lett. 71 2465
|
| [6] |
Victor R, Irina K, Maxim R and Akira S 2007 International Journal of High Speed Electronics and Systems 17 521
|
| [7] |
Huang J, Guo T Y, Zhang H Y, Xu J B, Fu X J, Yang H and Niu J B 2010 J. Semicond. 31 074008
|
| [8] |
Taiichi O 2011 Progress In Electromagnetics Research Symposium Proceedings, March 20-23, 2011, Marrakesh, Morocco, p. 1266
|
| [9] |
Taiichi O, Takayuki W, Stephane A B T, Akira S, Victor R, Vyacheslav P and Wojciech K 2014 Opt. Eng. 53 031206
|
| [10] |
Dyakonov M, Shur M 1996 IEEE Trans. Electron Dev. 43 1640
|
| [11] |
LU J Q, Shur M S, Hesler J L and Sun L 1998 IEEE Electron Dev. Lett. 19 373
|
| [12] |
Koo B H, Hanada T, Makino H, Chang J H and Yao T 2001 J. Crystal Growth 229 142
|
| [13] |
Zhou S X, Qi M, Ai L K and Xu A H 2016 Chin. Phys. B 25 096801
|
| [14] |
Wang H P, Wang G L, Yu Y, Xu Y Q, Ni H Q, Niu Z C and Gao F Q 2013 Acta Phys. Sin. 62 194205(in Chinese)
|
| [15] |
Duque C A, Akimov V, Demediuk R, Belykh V, Tiutiunnyk A, Morales A L, Restrepo R L, Nalivayko O, Fomina O, Mora-Ramos M E and Tulupenko V 2015 Superlattices and Microstructures 87 5
|
| [16] |
Daoudi M, Dhifallah I, Ouerghi A and Chtourou R 2012 Superlattices & Microstructures 51 497
|
| [17] |
Wang L M and Cao J C 2008 J. Semicond. 29 1357
|
| [18] |
Collin R E 1985 Antennas and Radiowave Propagation (New York:McCraw Hill) p. 79
|
| [19] |
Seliuta D, Kašalynas I, Tamošiünas V, Balakauskas S, Martünas Z, Ašmontas S, Valušis G, Lisauskas A, Roskos H G and Köhler K 2006 Electron. Lett. 42 825
|
| [20] |
Guo N, Hu W D, Chen X S, Wang L and Lu W 2013 Opt. Express 21 1606
|
| [21] |
Liu H R, Yu J S, Peter H and Byron A 2013 Int. J. Anten. Propag. 3 607
|
| [22] |
Dyer G C, Vinh N Q, Allen S J, Aizin G R, Mikalopas J, Reno J L and Shaner E A 2010 Appl. Phys. Lett. 97 193507
|
| [23] |
Knap W, Deng Y, Rumyantsev S, Lü J Q, Shur M S, Saylor C A and Brunel L C 2002 J. Appl. Phys. 91 9346
|
| [24] |
Li J L, Cui S H, Xu J X, Yuan Y, Su X B, Ni H Q and Niu Z C 2017 J. Infrared Millim. Waves 36 790(in Chinese)
|
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