Abstract Thin films of titanium carbide and amorphous hydrogenated carbon have been synthesized on titanium aluminium alloy substrates by PSII assisted MW-ECRCVD with a mirror field. The microstructure, chemical composition and mechanical property were investigated. Using XPS and TEM, the films were identified to be a-C:H film containing TiC nanometre grains (namely, the so-called nanocomposite structure). The size of TiC grains of nanocomposite TiC/DLC film is about 5 nm. The nanocomposite structure has obvious improvement in the mechanical properties of DLC film. The hardness of a-C:H film with Ti is enhanced to 34 G Pa, while that of a-C:H film without Ti is about 12 G Pa, and the coherent strength is also obviously enhanced at the critical load of about 35N.
Received: 03 June 2006
Revised: 20 October 2006
Accepted manuscript online:
Fund: Project supported by the
National Defence Key Laboratory Foundation of China (Grant No~51461070905ZS5003).
Cite this article:
Ma Guo-Jia(马国佳), Liu Xi-Liang(刘喜亮), Zhang Hua-Fang(张华芳), Wu Hong-Chen(武洪臣), and Peng Li-Ping(彭丽平) Nanocomposite TiC/a-C:H film prepared on titanium aluminium alloy substrates by PSII assistant MW-ECRCVD 2007 Chinese Physics 16 1105
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