Upgrading design of the 3B1A beamline for x-ray nanometre lithography of microelectronic devices at BSRF
Yi Fu-Ting (伊福廷)a, Ye Tian-Chun (叶甜春)b, Peng Liang-Qiang (彭良强)a, Chen Da-Peng (陈大鹏)b, Zhang Ju-Fang (张菊芳)a, Han Yong (韩勇)a
a Institute of High Energy Physics, China Academy of Science, Beijing 100039, China; b Institute of Micro Electronics, China Academy of Science, Beijing 100029, China
Abstract Beijing Synchrotron Radiation Facility is a partly dedicated synchrotron radiation source operated in either parasitic or dedicated mode. The 3B1A beamline, extracted from a bending magnet, was originally designed as a soft x-ray beamline for submicro x-ray lithography with critical lateral size just below 1μm in 1988 and no change has been made since it was built. But later the required resolution of x-ray lithography has changed from sub-micrometre to the nanometre in the critical lateral size. This beamline can longer more meet the requirement for x-ray nano lithography and has to be modified to fit the purpose. To upgrade the design of the 3B1A beamline for x-ray nano lithography, a mirror is used to reflect and scan the x-ray beam for the nano lithography station, but the mirror's grazing angle is changed to 27.9mrad in the vertical direction, and the convex curve needs to be modified to fit the change; the tiny change of mirror scanning angle is firstly considered to improve the uniformity of the x-ray spot on the wafer by controlling the convex curve.
Received: 19 September 2003
Revised: 21 December 2003
Accepted manuscript online:
(X- and γ-ray sources, mirrors, gratings, and detectors)
Fund: Project partially supported by the Chinese 863 Plan (Contract No 2002AA404150).
Cite this article:
Yi Fu-Ting (伊福廷), Ye Tian-Chun (叶甜春), Peng Liang-Qiang (彭良强), Chen Da-Peng (陈大鹏), Zhang Ju-Fang (张菊芳), Han Yong (韩勇) Upgrading design of the 3B1A beamline for x-ray nanometre lithography of microelectronic devices at BSRF 2004 Chinese Physics 13 731
Altmetric calculates a score based on the online attention an article receives. Each coloured thread in the circle represents a different type of online attention. The number in the centre is the Altmetric score. Social media and mainstream news media are the main sources that calculate the score. Reference managers such as Mendeley are also tracked but do not contribute to the score. Older articles often score higher because they have had more time to get noticed. To account for this, Altmetric has included the context data for other articles of a similar age.
