Abstract In this paper, the structures, optical and mechanical properties of diamond-like carbon films are studied, which are prepared by a self-fabricated electron cyclotron resonance microwave plasma chemical vapour deposition method at room temperature in the ambient gases of mixed acetylene and nitrogen. The morphology and microstructure of the processed film are characterized by the atomic force microscope image, Raman spectra and middle Fourier transform infrared transmittance spectra, which reveal that there is an intertwisted fibrillar diamond-like structure in the film and the film is mainly composed of sp$^3$ CH, sp$^3$ C—C, sp$^2$ C═C, C═N and C$_{60}$. The film micro-hardness and bulk modulus are measured by a nano-indenter and the refractive constant and deposition rate are also calculated.
Received: 28 February 2003
Revised: 03 June 2003
Accepted manuscript online:
Fund: Project supported by the National Natural Science Foundation of China (Grant No 50071068).
Cite this article:
Yang Wu-Bao (杨武保), Wang Jiu-Li (王久丽), Zhang Gu-Ling (张谷令), Fan Song-Hua (范松华), Liu Chi-Zi (刘赤子), Yang Si-Ze (杨思泽) Intertwisted fibrillar diamond-like carbon films prepared by electron cyclotron resonance microwave plasma enhanced chemical vapour deposition 2003 Chinese Physics 12 1257
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