Chin. Phys. B
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Chin. Phys. B  2011, Vol. 20 Issue (10): 108103    DOI: 10.1088/1674-1056/20/10/108103
INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY Current Issue| Next Issue| Archive| Adv Search |
Enhanced etching of silicon dioxide guided by carbon nanotubes in HF solution
Wei Qin-Qina, Fu Yun-Yia, Wei Zi-Juna, Zhang Yanb, Li Yanb, Zhao Hua-Boc, Ying Alex Yi-Qunc, Yan Fengc, Zhang Zhao-Huic
a Department of Microelectronics, Peking University, Beijing 100871, China; b Key Laboratory for Physics and Chemistry of Nanodevices, College of Chemistry and Molecular Engineering, Peking University, Beijing 100871, China; c State Key Laboratory for Artificial Microstructures and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, China

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