High efficiency and broad bandwidth grating coupler between nanophotonic waveguide and fibre

doi:10.1088/1674-1056/19/1/014219

Abstract A high efficiency and broad bandwidth grating coupler between a silicon-on-insulator (SOI) nanophotonic waveguide and fibre is designed and fabricated. Coupling efficiencies of 46% and 25% at a wavelength of 1.55 μm are achieved by simulation and experiment, respectively. An optical 3 dB bandwidth of 45 nm from 1530 nm to 1575 nm is also obtained in experiment. Numerical calculation shows that a tolerance to fabrication error of 10 nm in etch depth is achievable. The measurement results indicate that the alignment error of ±2 μm results in less than 1 dB additional coupling loss.

Keywords: grating coupler silicon-on-insulator coupling efficiency bandwidth

Received: 06 December 2008
Revised: 04 June 2009
Accepted manuscript online:

PACS:	42.82.Et	(Waveguides, couplers, and arrays)
	42.79.Dj	(Gratings)
	42.79.Gn	(Optical waveguides and couplers)
	42.81.Bm	(Fabrication, cladding, and splicing)
	42.81.Qb	(Fiber waveguides, couplers, and arrays)

Fund: Project supported in part by the National Natural Science Foundation of China (Grant Nos. 60537010 and 60877036), the National Basic Research Program of China (Grant No. 2006CB302803) and the Knowledge Innovation Program of Institute of Semiconductors, Chinese Academy of Sciences (ISCAS) (Grant No. ISCAS2008T10).

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Zhu Yu(朱宇), Xu Xue-Jun(徐学俊), Li Zhi-Yong(李智勇), Zhou Liang(周亮), Han Wei-Hua(韩伟华),Fan Zhong-Chao(樊中朝),Yu Yu-De(俞育德), and Yu Jin-Zhong(余金中) High efficiency and broad bandwidth grating coupler between nanophotonic waveguide and fibre 2010 Chin. Phys. B 19 014219

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High efficiency and broad bandwidth grating coupler between nanophotonic waveguide and fibre

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