Numerical and experimental study of the mesa configuration in high-voltage 4H-SiC PiN rectifiers

doi:10.1088/1674-1056/25/8/087201

Abstract The effect of the mesa configuration on the reverse breakdown characteristic of a SiC PiN rectifier for high-voltage applications is analyzed in this study. Three geometrical parameters, i.e., mesa height, mesa angle and mesa bottom corner, are investigated by numerical simulation. The simulation results show that a deep mesa height, a small mesa angle and a smooth mesa bottom (without sub-trench) could contribute to a high breakdown voltage due to a smooth and uniform surface electric field distribution. Moreover, an optimized mesa structure without sub-trench (mesa height of 2.2 μm and mesa angle of 20°) is experimentally demonstrated. A maximum reverse blocking voltage of 4 kV and a forward voltage drop of 3.7 V at 100 A/cm² are obtained from the fabricated diode with a 30-μm thick N^- epi-layer, corresponding to 85% of the ideal parallel-plane value. The blocking characteristic as a function of the JTE dose is also discussed for the PiN rectifiers with and without interface charge.

Keywords: silicon carbide mesa configuration PiN rectifier breakdown voltage

Received: 21 January 2016
Revised: 20 April 2016
Accepted manuscript online:

PACS:	72.20.Ht	(High-field and nonlinear effects)
	85.30.De	(Semiconductor-device characterization, design, and modeling)
	73.40.Kp	(III-V semiconductor-to-semiconductor contacts, p-n junctions, and heterojunctions)

Fund: Project supported by the State Key Program of the National Natural Science Foundation of China (Grant No. 61234006), the Open Foundation of the State Key Laboratory of Electronic Thin Films and Integrated Devices, China (Grant No. KFJJ201301), and the National Science and Technology Major Project of the Ministry of Science and Technology, China (Grant No. 2013ZX02305-003).

Corresponding Authors: Xiao-Chuan Deng
E-mail: xcdeng@uestc.edu.cn

Cite this article:

Xiao-Chuan Deng(邓小川), Xi-Xi Chen(陈茜茜), Cheng-Zhan Li(李诚瞻), Hua-Jun Shen(申华军), Jin-Ping Zhang(张金平) Numerical and experimental study of the mesa configuration in high-voltage 4H-SiC PiN rectifiers 2016 Chin. Phys. B 25 087201

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Numerical and experimental study of the mesa configuration in high-voltage 4H-SiC PiN rectifiers

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