Bandwidth-tunable silicon nitride microring resonators

doi:10.1088/1674-1056/ac2e64

Abstract We designed a reconfigurable dual-interferometer coupled silicon nitride microring resonator. By tuning the integrated heater on interferometer's arms, the "critical coupling" bandwidth of resonant mode is continuously adjustable whose quality factor varies from 7.9×10⁴ to 1.9×10⁵ with the extinction ratio keeping higher than 25 dB. Also a variety of coupling spanning from "under-coupling" to "over-coupling" were achieved, showing the ability to tune the quality factor from 6.0×10³ to 2.3×10⁵. Our design can provide an adjustable filtering method on silicon nitride photonic chip and contribute to optimize the nonlinear process for quantum photonics and all-optical signal processing.

Keywords: silicon nitride microring resonators Mach-Zehnder interferometer ring filter nonlinear optics

Received: 30 September 2021
Revised: 09 October 2021
Accepted manuscript online: 11 October 2021

PACS:	42.65.-k	(Nonlinear optics)
	42.65.Wi	(Nonlinear waveguides)

Fund: Project supported by the National Key Research and Development Program of China (Grant Nos. 2019YFA0308700 and 2017YFA0303700), the National Natural Science Foundation of China (Grant Nos. 11627810 and 11690031), and the Open Funds from the State Key Laboratory of High Performance Computing of China (HPCL, National University of Defense Technology).

Corresponding Authors: Ping Xu
E-mail: pingxu520@nju.edu.cn

Cite this article:

Jiacheng Liu(刘嘉成), Chao Wu(吴超), Gongyu Xia(夏功榆), Qilin Zheng(郑骑林), Zhihong Zhu(朱志宏), and Ping Xu(徐平) Bandwidth-tunable silicon nitride microring resonators 2022 Chin. Phys. B 31 014201

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