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Chin. Phys. B, 2020, Vol. 29(8): 087803    DOI: 10.1088/1674-1056/aba273
CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES Prev   Next  

Thermal stability of magnetron sputtering Ge-Ga-S films

Lei Niu(牛磊)1, Yimin Chen(陈益敏)1,2, Xiang Shen(沈祥)1, Tiefeng Xu(徐铁峰)1
1 Laboratory of Infrared Materials and Devices&Key Laboratory of Photoelectric Detection Materials and Devices of Zhejiang Province, Research Institute of Advanced Technology, Ningbo University, Ningbo 315211, China;
2 Department of Microelectronic Science and Engineering, School of Physical Science and Technology, Ningbo University, Ningbo 315211, China
Abstract  Ge-Ga-S thin films were deposited by magnetron sputtering with mean coordination number (MCN) ranging from 2.46 to 2.94. The physical properties of the Ge-Ga-S films, including optical band gap, refractive index, and thickness, vary with the time of heat treatment. Based on the analysis of the topology model, it is concluded that the Ge-Ga-S thin films with components close to the stoichiometric ratio can form the most Ga-S bonds and Ga-S bonds, and the physical properties of the Ge27.3Ga6.3S66.3 (MCN=2.62) film are the most stable. This is an important reference for thin film photonic devices.
Keywords:  chalcogenide thin films      refractive index      optical band gap      thermal stability  
Received:  10 April 2020      Revised:  17 June 2020      Accepted manuscript online: 
PACS:  78.20.Ci (Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity))  
  78.40.Fy (Semiconductors)  
  78.40.-q (Absorption and reflection spectra: visible and ultraviolet)  
Fund: Project supported by the National Natural Science Foundation of China (Grant Nos. 61675105, 61775111, and 61904091), Ningbo Optoelectronic Materials and Devices Laboratory (Grant No. 2009B21007), and K. C. Wong Magna Fund in Ningbo University of China.
Corresponding Authors:  Yimin Chen, Xiang Shen     E-mail:  chenyimin@nbu.edu.cn;shenxiang@nbu.edu.cn

Cite this article: 

Lei Niu(牛磊), Yimin Chen(陈益敏), Xiang Shen(沈祥), Tiefeng Xu(徐铁峰) Thermal stability of magnetron sputtering Ge-Ga-S films 2020 Chin. Phys. B 29 087803

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