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Chin. Phys. B, 2016, Vol. 25(7): 078109    DOI: 10.1088/1674-1056/25/7/078109
INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY Prev   Next  

Molecular dynamics study of anisotropic growth of silicon

Naigen Zhou(周耐根)1, Bo Liu(刘博)1, Chi Zhang(张弛)1, Ke Li(李克)1, Lang Zhou(周浪)1,2
1 School of Materials Science and Engineering, Nanchang University, Nanchang 330031, China;
2 Institute of Photovoltaics, Nanchang University, Nanchang 330031, China
Abstract  Based on the Tersoff potential, molecular dynamics simulations have been performed to investigate the kinetic coefficients and growth velocities of Si (100), (110), (111), and (112) planes. The sequences of the kinetic coefficients and growth velocities are μ(100)> μ(110)> μ(112) > μ(111) and v(100)> v(110) > v(112) > v(111), respectively, which are not consistent with the sequences of the interface energies, interplanar spacings, and melting points of the four planes. However, they agree well with the sequences of the distributions and diffusion coefficients of the melting atoms near the solid-liquid interfaces. It indicates that the atomic distributions and diffusion coefficients affected by the crystal orientations determine the anisotropic growth of silicon. The formation of stacking fault structure will further decrease the growth velocity of the Si (111) plane.
Keywords:  anisotropy growth      kinetic coefficient      silicon      molecular dynamics  
Received:  24 January 2016      Revised:  08 March 2016      Published:  05 July 2016
PACS:  81.10.-h (Methods of crystal growth; physics and chemistry of crystal growth, crystal morphology, and orientation)  
  81.10.Aj (Theory and models of crystal growth; physics and chemistry of crystal growth, crystal morphology, and orientation)  
  87.10.Tf (Molecular dynamics simulation)  
Fund: Project supported by the National Natural Science Foundation of China (Grant Nos. 51361022, 51561022, and 61464007) and the Natural Science Foundation of Jiangxi Province, China (Grant No. 20151BAB206001).
Corresponding Authors:  Lang Zhou     E-mail:  lzhou@ncu.edu.cn

Cite this article: 

Naigen Zhou(周耐根), Bo Liu(刘博), Chi Zhang(张弛), Ke Li(李克), Lang Zhou(周浪) Molecular dynamics study of anisotropic growth of silicon 2016 Chin. Phys. B 25 078109

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