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Chin. Phys. B, 2016, Vol. 25(7): 078107    DOI: 10.1088/1674-1056/25/7/078107
INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY Prev   Next  

Hexagonal boron nitride hollow capsules with collapsed surfaces: Chemical vapor deposition with single-source precursor ammonium fluoroborate

Xiaopeng Li(李肖鹏)1, Jun Zhang(张军)1, Chao Yu(郁超)1, Xiaoxi Liu(刘晓喜)1, Saleem Abbas1, Jie Li(李杰)1, Yanming Xue(薛彦明)2, Chengchun Tang(唐成春)1
1 School of Material Science and Engineering, Hebei University of Technology, Tianjin 300130, China;
2 World Premier International Center for Materials Nanoarchitectonics (WPI-MANA), National Institute for Materials Science (NIMS), Namiki 1-1, Tsukuba, Ibaraki 305-0044, Japan
Abstract  

SBA-15 (mesoporous SiO2) is used to stabilize and transfer F- in the NH4BF4 CVD reaction for the first time, and a large-scale crystalline h-BN phase can be prepared. We successfully fabricate hollow h-BN capsules with collapsed surfaces in our designed NH4BF4 CVD system. Optimum temperature conditions are obtained, and a detailed formation mechanism is further proposed. The successful SBA-15-assisted NH4BF4 CVD route is of importance and enriches the engineering technology in the h-BN single-source CVD reaction.

Keywords:  hollow capsule      hexagonal boron nitride      chemical vapor deposition      ammonium fluoroborate  
Received:  10 January 2016      Revised:  25 February 2016      Published:  05 July 2016
PACS:  81.07.-b (Nanoscale materials and structures: fabrication and characterization)  
  81.05.Je (Ceramics and refractories (including borides, carbides, hydrides, nitrides, oxides, and silicides))  
  81.15.Gh (Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.))  
  78.30.Hv (Other nonmetallic inorganics)  
Fund: 

Project supported by the National Natural Science Foundation of China (Grant Nos. 51332005, 51372066, 51172060, 51202055, and 21103056).

Corresponding Authors:  Yanming Xue, Chengchun Tang     E-mail:  XUE.Yanming@nims.go.jp;tangcc@hebut.edu.cn

Cite this article: 

Xiaopeng Li(李肖鹏), Jun Zhang(张军), Chao Yu(郁超), Xiaoxi Liu(刘晓喜), Saleem Abbas, Jie Li(李杰), Yanming Xue(薛彦明), Chengchun Tang(唐成春) Hexagonal boron nitride hollow capsules with collapsed surfaces: Chemical vapor deposition with single-source precursor ammonium fluoroborate 2016 Chin. Phys. B 25 078107

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