Fabrication of rhenium Josephson junctions

doi:10.1088/1674-1056/22/9/097401

Abstract Rhenium is a superconductor with a relatively weak tendency to oxidize, which is advantageous in superconducting quantum circuit and qubit applications. In this work, Re/Al-AlO_x/Re Josephson tunnel junctions were fabricated using a selective film-etching process similar to that developed in Nb trilayer technology. The Re films had a superconducting transition temperature of 4.8 K and a transition width of 0.2 K. The junctions were found to be highly reproducible using the fabrication process and their characteristics had good quality with a low leakage current and showed a superconducting gap of 0.55 meV.

Keywords: Re Josephson junctions trilayer process qubit application

Received: 29 March 2013
Revised: 14 May 2013
Accepted manuscript online:

PACS:	74.50.+r	(Tunneling phenomena; Josephson effects)
	74.78.-w	(Superconducting films and low-dimensional structures)
	85.25.Cp	(Josephson devices)

Fund: Project supported by the National Natural Science Foundation of China (Grant Nos. 11104340 and 11104332) and the Ministry of Science and Technology of China (Grant Nos. 2009CB929102 and 2011CBA00106).

Corresponding Authors: Zhao Shi-Ping
E-mail: spzhao@iphy.ac.cn

Cite this article:

Xue Guang-Ming (薛光明), Yu Hai-Feng (于海峰), Tian Ye (田野), Liu Wei-Yang (刘伟洋), Yu Hong-Wei (于洪伟), Ren Yu-Feng (任育峰), Zhao Shi-Ping (赵士平) Fabrication of rhenium Josephson junctions 2013 Chin. Phys. B 22 097401

[1]	Clarke J and Wilhelm F K 2008 Nature 453 1031
[2]	You J Q and Nori F 2011 Nature 474 589
[3]	Simmonds R W, Lang K M, Hite D A, Nam S, Pappas D P and Martinis J M 2004 Phys. Rev. Lett. 93 077003
[4]	Oh S, Cicak K, McDermott R, Cooper K B, Osborn K D, Simmonds R W, Steffen M, Martinis J M and Pappas D P 2005 Supercond. Sci. Technol. 18 1396
[5]	Oh S, Cicak K, Kline J S, Sillanpää M A, Osborn K D, Whittaker J D, Simmonds R W and Pappas D P 2006 Phys. Rev. B 74 100502
[6]	Wang H, Hofheinz M, Wenner J, Ansmann M, Bialczak R C, Lenander M, Lucero E, Neeley M, O’Connell A D, Sank D, Weides M, Cleland A N and Martinis J M 2009 Appl. Phys. Lett. 95 233508
[7]	Bennett D A, Longobardi L, Patel V, Chen W and Lukens J E 2007 Supercond. Sci. Technol. 20 S445
[8]	Yu H F, Cao W H, Zhu X B, Yang H F, Yu H W, Ren Y F, Gu C Z, Chen G H and Zhao S P 2008 Chin. Phys. B 17 3083
[9]	Cao W H, Yu H F, Tian Ye, Yu H W, Ren Y F, Chen G H and Zhao S P 2009 Chin. Phys. B 18 5044
[10]	Kroger H, Smith L N and Jillie D W 1981 Appl. Phys. Lett. 39 280
[11]	Gurvitch M,Washington M A and Huggins H A 1983 Appl. Phys. Lett. 42 472
[12]	Zhao S P, Du H, Chen G H and Yang Q S 1998 Appl. Phys. Lett. 72 3062
[13]	Bond W L, Cooper A S, Andres K, Hull G W, Geballe T H and Matthias B T 1965 Phys. Rev. Lett. 15 260
[14]	Frieberthauser P E and Notarys H A 1970 J. Vacuum Sci. Technol. 7 485
[15]	Oh S, Hite D A, Cicak K, Osborn K D, Simmonds R W, McDermott R, Cooper K B, Steffen M, Martinis J M and Pappas D P 2006 Thin Solid Films 496 389
[16]	Solymar L 1972 Superconductive Tunneling and Applications (London: Chapman and Hall)
[17]	Foden C L, Rando N, van Dordrecht A, Peacock A, Lumley J and Pereira C 1993 Phys. Rev. B 47 3316
[18]	Kaghazchi P and Jacob T 2011 Phys. Rev. B 83 035417

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