A functional probe with bowtie aperture and bull's eye structure for nanolithograph

doi:10.1088/1674-1056/21/10/107302

Abstract The bowtie aperture surrounded by concentric gratings (the bull's eye structure) integrated on the near-field scanning optical microscopy (NSOM) probe (aluminum coated fiber tip) for nanolithography has been investigated using the finite-difference time domain (FDTD) method. By modifying the parameters of the bowtie aperture and the concentric gratings, a maximal field enhancement factor of 391.69 has been achieved, which is 18 times larger than that obtained from the single bowtie aperture. Additionally, the light spot depends on the gap size of the bowtie aperture and can be confined to sub-wavelength. The superiority of the combination of the bowtie aperture and the bull's eye structure is confirmed, and the mechanism for the electric field enhancement in this derived structure is analyzed.

Keywords: surface plasmon polariton nanolithography finite difference time domain method

Received: 22 February 2012
Revised: 12 June 2012
Accepted manuscript online:

PACS:	73.20.Mf	(Collective excitations (including excitons, polarons, plasmons and other charge-density excitations))
	42.82.Cr	(Fabrication techniques; lithography, pattern transfer)
	02.60.Cb	(Numerical simulation; solution of equations)

Fund: Project supported by the National Natural Science Foundation of China (Grant Nos. 10974025 and 61137005).

Corresponding Authors: Li Xu-Feng, Pan Shi
E-mail: xfli@mail.dlut.edu.cn; span@dlut.edu.cn

Cite this article:

Wang Shuo (王硕), Li Xu-Feng (李旭峰), Wang Qiao (王乔), Guo Ying-Yan (郭英楠), Pan Shi (潘石) A functional probe with bowtie aperture and bull's eye structure for nanolithograph 2012 Chin. Phys. B 21 107302

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A functional probe with bowtie aperture and bull's eye structure for nanolithograph

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