Rugate filters prepared by rapidly alternating deposition

doi:10.1088/1674-1056/20/9/094212

Abstract A methodology for the fabrication of composite (Nb₂O₅)_1-x(SiO₂)_x thin-film rugate filters by using pulsed direct current magnetron sputtering is presented. The two materials are mixed using rapidly alternating deposition technology. The optical properties of the composite films varying with the composition of the material are studied in detail. Refractive indices between 1.50 and 2.14 can be realized in our coating system. Two designed rugate filters with a reflection band at the wavelength of 532 nm are fabricated using an automatic deposition process. The microstructure of the rugate filter is investigated by using scanning electron microscopy. The calculated and the measured transmittance spectra are in good agreement with each other. The causes of the slight differences between them are also analysed.

Keywords: rapidly alternating deposition rugate filter magnetron sputtering mixed oxides

Received: 21 March 2011
Revised: 22 April 2011
Accepted manuscript online:

PACS:	42.79.Ry	(Gradient-index (GRIN) devices)
	81.15.Cd	(Deposition by sputtering)

Fund: Project supported by the National Natural Science Foundation of China (Grant Nos. 10704079 and 10976030).

Cite this article:

Zhang Jun-Chao(张俊超), Fang Ming(方明), Shao Yu-Chuan(邵宇川), Jin Yun-Xia(晋云霞), and He Hong-Bo(贺洪波) Rugate filters prepared by rapidly alternating deposition 2011 Chin. Phys. B 20 094212

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Rugate filters prepared by rapidly alternating deposition

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