A dynamic macromodel for distributed parameter magnetic microactuators
Fang Yu-Ming(方玉明)a)b)†, Huang Qing-An(黄庆安)a), and Li Wei-Hua(李伟华)a)
a Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China; b Department of Optoelectrical Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210003, China
Abstract This paper presents a reduced-order model to describe the mechanical behaviour of microbeam-based magnetic devices. The integration for magnetic force is calculated by dividing the microbeam into several segments, and the nonlinear equation set has been developed based on the magnetic circuit principle. In comparison with previous models, the present macromodel accounts for both the micro-magnetic-core reluctance and the coupling between the beam deflection and magnetic force. This macromodel is validated by comparing with the experimental results available in some papers and finite-element solutions.
Received: 17 June 2007
Revised: 25 September 2007
Accepted manuscript online:
PACS:
85.85.+j
(Micro- and nano-electromechanical systems (MEMS/NEMS) and devices)
Fund: Project supported in part by the
National High Technology Research and
Development Program of China (Grant No 2006AA04z302).
Cite this article:
Fang Yu-Ming(方玉明), Huang Qing-An(黄庆安), and Li Wei-Hua(李伟华) A dynamic macromodel for distributed parameter magnetic microactuators 2008 Chin. Phys. B 17 1709
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