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Chin. Phys., 2004, Vol. 13(5): 731-736    DOI: 10.1088/1009-1963/13/5/027
CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES Prev   Next  

Upgrading design of the 3B1A beamline for x-ray nanometre lithography of microelectronic devices at BSRF

Yi Fu-Tinga, Peng Liang-Qianga, Zhang Ju-Fanga, Han Yonga, Ye Tian-Chunb, Chen Da-Pengb
a Institute of High Energy Physics, China Academy of Science, Beijing 100039, China; b Institute of Micro Electronics, China Academy of Science, Beijing 100029, China
Abstract  Beijing Synchrotron Radiation Facility is a partly dedicated synchrotron radiation source operated in either parasitic or dedicated mode. The 3B1A beamline, extracted from a bending magnet, was originally designed as a soft x-ray beamline for submicro x-ray lithography with critical lateral size just below 1μm in 1988 and no change has been made since it was built. But later the required resolution of x-ray lithography has changed from sub-micrometre to the nanometre in the critical lateral size. This beamline can longer more meet the requirement for x-ray nano lithography and has to be modified to fit the purpose. To upgrade the design of the 3B1A beamline for x-ray nano lithography, a mirror is used to reflect and scan the x-ray beam for the nano lithography station, but the mirror's grazing angle is changed to 27.9mrad in the vertical direction, and the convex curve needs to be modified to fit the change; the tiny change of mirror scanning angle is firstly considered to improve the uniformity of the x-ray spot on the wafer by controlling the convex curve.
Keywords:  synchrotron radiation beamline      x-ray      x-ray lithography      synchrotron radiation  
Received:  19 September 2003      Revised:  21 December 2003      Published:  06 July 2005
PACS:  85.40.Hp (Lithography, masks and pattern transfer)  
  07.85.Qe (Synchrotron radiation instrumentation)  
  07.85.Fv (X- and γ-ray sources, mirrors, gratings, and detectors)  
Fund: Project partially supported by the Chinese 863 Plan (Contract No 2002AA404150).

Cite this article: 

Yi Fu-Ting, Peng Liang-Qiang, Zhang Ju-Fang, Han Yong, Ye Tian-Chun, Chen Da-Peng Upgrading design of the 3B1A beamline for x-ray nanometre lithography of microelectronic devices at BSRF 2004 Chin. Phys. 13 731

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