Abstract A quantum efficiency analytical model for complementary metal–oxide–semiconductor (CMOS) image pixels with a pinned photodiode structure is developed. The proposed model takes account of the non-uniform doping distribution in the N-type region due to the impurity compensation formed by the actual fabricating process. The characteristics of two boundary PN junctions located in the N-type region for the particular spectral response of a pinned photodiode, are quantitatively analyzed. By solving the minority carrier steady-state diffusion equations and the barrier region photocurrent density equations successively, the analytical relationship between the quantum efficiency and the corresponding parameters such as incident wavelength, N-type width, peak doping concentration, and impurity density gradient of the N-type region is established. The validity of the model is verified by the measurement results with a test chip of 160× 160 pixels array, which provides the accurate process with a theoretical guidance for quantum efficiency design in pinned photodiode pixels.
Fund: Project supported by the National Defense Pre-Research Foundation of China (Grant No. 51311050301095).
Corresponding Authors:
Cao Chen
E-mail: intercaochen@163.com
Cite this article:
Cao Chen (曹琛), Zhang Bing (张冰), Wu Long-Sheng (吴龙胜), Li Na (李娜), Wang Jun-Feng (王俊峰) A quantum efficiency analytical model for complementary metal–oxide–semiconductor image pixels with a pinned photodiode structure 2014 Chin. Phys. B 23 124215
[1]
Shoushun C, Boussaid F and Bermak A 2008 IEEE Sensors Journal 8 286
[2]
Chen S, Tang W and Culurciello E 2010 Proceedings of 2010 IEEE International Symposium on Circuits and Systems (ISCAS), May 30-June 2, 2010, Paris, France, p. 1404
[3]
He J, Su Y M, Ma Y T, Chen Q, Wang R N, Ye Y, Ma Y and Liang H L 2012 Chin. Phys. B 21 076104
[4]
Goiffon V, Virmontois C, Magnan P, Cervantes P, Place S, Gaillardin M, Girard S, Paillet P, Estribeau M and Martin P 2012 IEEE Trans. Nucl. Sci. 59 918
[5]
Raverzzi L, Betta G F, Stoppa D and Simoni A 2000 Microelectronics Journal 31 227
[6]
Desai N R, Hoang K V and Sonek G J 1993 IEEE Trans. Education 36 357
[7]
Perry R J and Arora K 1996 Proceedings of IEEE Southeastcon Bringing Together Education Science and Technology, April 11-14, 1996, Tampa, USA, p. 374
[8]
Djite I, Estribeau M, Magnan P, Rolland G, Petit S and Saint-Pe O 2012 IEEE Trans. Electron. Dev. 59 729
[9]
Zeng H M, Wei T C and Zheng R 2011 IEEE International Conference on Signal Processing, Communications and Computing (ICSPCC), September 14-16, 2011, Xi'an, China, p. 1
[10]
Cao C, Zhang B, Wu L S, Li X and Wang J F 2014 Chin. J. Semicond. 35 074012
[11]
Liu W J, Chen O T, Dai L K and Weng P K 2001 Proceedings of the 5th IEEE International Workshop on Behavioral Modeling and Simulation, October 10-12, 2001, Santa Rosa, USA, p. 102
[12]
Puliyankot V and Hueting R J 2012 IEEE Trans. Electron. Dev. 59 26
[13]
Liu E K, Zhu B S and Luo J S 2012 The Physics of Semiconductors (Beijing: Electronics Industry) p. 177 (in Chinese)
[14]
Lee P P 2000 U.S. Patent 5 625 210 [2000-08-08]
[15]
Liu E K, Zhu B S and Luo J S 2012 The Physics of Semiconductors (Beijing: Electronics Industry) p. 181 (in Chinese)
[16]
Ni J H 2008 "CMOS Image Sensors Sensitivity Improvement via Process Optimization" (MS Thesis) (Shanghai: Shanghai Jiao Tong University) (in Chinese)
[17]
Wu K, Wei T B, Lan D, Zheng H Y, Wang J X, Luo Y and Li J M 2014 Chin. Phys. B 23 028504
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