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Analysis of proton and γ-ray radiation effects on CMOS active pixel sensors |
Lindong Ma(马林东)1,2,3, Yudong Li(李豫东)1,2, Qi Guo(郭旗)1,2, Lin Wen(文林)1,2, Dong Zhou(周东)1,2, Jie Feng(冯婕)1,2, Yuan Liu(刘元)1,2,3, Junzhe Zeng(曾骏哲)1,2,3, Xiang Zhang(张翔)1,2,3, Tianhui Wang(王田珲)1,2,3 |
1. Key Laboratory of Functional Materials and Devices for Special Environments of Chinese Academy of Sciences, Xinjiang Technical Institute of Physics & Chemistry, Urumqi 830011, China;
2. Xinjiang Key Laboratory of Electronic Information Material and Device, Urumqi 830011, China;
3. University of Chinese Academy of Sciences, Beijing 100190, China |
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Abstract Radiation effects on complementary metal-oxide-semiconductor (CMOS) active pixel sensors (APS) induced by proton and γ-ray are presented. The samples are manufactured with the standards of 0.35 μm CMOS technology. Two samples have been irradiated un-biased by 23 MeV protons with fluences of 1.43×1011 protons/cm2 and 2.14×1011 protons/cm2, respectively, while another sample has been exposed un-biased to 65 krad(Si) 60Co γ-ray. The influences of radiation on the dark current, fixed-pattern noise under illumination, quantum efficiency, and conversion gain of the samples are investigated. The dark current, which increases drastically, is obtained by the theory based on thermal generation and the trap induced upon the irradiation. Both γ-ray and proton irradiation increase the non-uniformity of the signal, but the non-uniformity induced by protons is even worse. The degradation mechanisms of CMOS APS image sensors are analyzed, especially for the interaction induced by proton displacement damage and total ion dose (TID) damage.
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Received: 08 May 2017
Revised: 03 July 2017
Accepted manuscript online:
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PACS:
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42.88.+h
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(Environmental and radiation effects on optical elements, devices, and systems)
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85.60.Dw
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(Photodiodes; phototransistors; photoresistors)
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05.40.-a
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(Fluctuation phenomena, random processes, noise, and Brownian motion)
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42.50.-p
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(Quantum optics)
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Fund: Project supported the National Natural Science Foundation of China (Grant No. 11675259), the West Light Foundation of the Chinese Academy of Sciences (Grant Nos. XBBS201316, 2016-QNXZ-B-2, and 2016-QNXZ-B-8), and Young Talent Training Project of Science and Technology, Xinjiang, China (Grant No. qn2015yx035). |
Corresponding Authors:
Yudong Li
E-mail: lydong@ms.xjb.ac.cn
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Cite this article:
Lindong Ma(马林东), Yudong Li(李豫东), Qi Guo(郭旗), Lin Wen(文林), Dong Zhou(周东), Jie Feng(冯婕), Yuan Liu(刘元), Junzhe Zeng(曾骏哲), Xiang Zhang(张翔), Tianhui Wang(王田珲) Analysis of proton and γ-ray radiation effects on CMOS active pixel sensors 2017 Chin. Phys. B 26 114212
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