Germanium nanoislands grown by radio frequency magnetron sputtering：Annealing time dependent surface morphology and photoluminescence

doi:10.1088/1674-1056/22/9/098102

Abstract Structural and optical properties of ～ 20 nm Ge nanoislands grown on Si(100) by radio frequency (rf) magnetron sputtering under varying annealing conditions are reported. Rapid thermal annealing at a temperature of 600℃ for 30 s, 90 s, and 120 s are performed to examine the influence of annealing time on the surface morphology and photoluminescence properties. X-ray diffraction spectra reveal prominent Ge and GeO₂ peaks highly sensitive to the annealing time. Atomic force microscope micrographs of the as-grown sample show pyramidal nanoislands with relatively high-density (～ 10¹¹ cm^-2). The nanoislands become dome-shaped upon annealing through a coarsening process mediated by Oswald ripening. The room temperature photoluminescence peaks for both as-grown (～ 3.29 eV) and annealed (～ 3.19 eV) samples consist of high intensity and broad emission, attributed to the effect of quantum confinement. The red shift (～ 0.10 eV) of the emission peak is attributed to the change in the size of the Ge nanoislands caused by annealing. Our easy fabrication method may contribute to the development of Ge nanostructure-based optoelectronics.

Keywords: germanium nanoislands radio frequency magnetron sputtering photoluminescence surface morphology

Received: 04 March 2013
Revised: 21 March 2013
Accepted manuscript online:

PACS:	81.07.-b	(Nanoscale materials and structures: fabrication and characterization)
	78.67.-n	(Optical properties of low-dimensional, mesoscopic, and nanoscale materials and structures)
	79.20.Rf	(Atomic, molecular, and ion beam impact and interactions with surfaces)
	78.55.+m

Fund: Project supported by the International Doctoral Fellowship (IDF), Ibnu Sina Institute for Fundamental Science Study and research grants of MoHE GUP. Vot No. 02H94 and 07J80.

Corresponding Authors: Z. Othaman
E-mail: zulothaman@gmail.com

Cite this article:

Alireza Samavati, Z. Othaman, S. K. Ghoshal, R. J. Amjad Germanium nanoislands grown by radio frequency magnetron sputtering：Annealing time dependent surface morphology and photoluminescence 2013 Chin. Phys. B 22 098102

[1]	Samavati A R, Othaman Z, Ghoshal S K, Dousti M R and Amjad R J 2012 Chin. Phys. Lett. 29 118101
[2]	Fujii M, Kanzava Y, Hayashi S and Yamamoto K 1996 Phys. Rev. B 54 8373
[3]	Ekimov A 1996 J. Lumin. 70 1
[4]	Huang S, Xia Z, Xia H, Zheng J, Xie Y and Xie G 2009 Surf. Coat. Technol. 204 558
[5]	Ray S K and Das K 2005 Opt. Mater. 27 948
[6]	Das K, Goswami M L N, Dhar A, Mathur B K and Ray S K 2007 Nanotechnology 18 175301
[7]	Yang J, Jin Y, Wang C, Li L, Tao D and Yang Y 2012 Appl. Surf. Sci. 258 3637
[8]	Jie Y X, Wee A T S, Huan C H A, Sun W X, Shen Z X and Chuab S J 2004 Mater. Sci Eng. B 107 8
[9]	Zhao Y N, Cao M S, Jin H B, Zhang L and Qiu C J 2006 Scripta Mater. 54 2057
[10]	Yang X Y, Cheng J Y, LI B, CAO W Q, Yuan J, Zhang D Q and Cao M S 2012 Chin. Phys. Lett. 29 108101
[11]	Mestanza S N M, Rodriguez E and Frateschi N C 2006 Nanotechnology 17 4548
[12]	Sun K W, Sue S H and Liu C W 2005 Physica E 28 525
[13]	Wan Q, Wang T H, Liu W L and Lin C L 2003 J. Cryst. Growth. 249 23
[14]	Eaglesham D J and Cerullo M 1990 Phys. Rev. Lett. 64 1943
[15]	Ronda A, Abdallah M, Gay J M, Stettner J and Berbezier I 2000 Appl. Surf. Sci. 162 576
[16]	Mckay M R, Shumway J and Drucker J 2006 J. Appl. Phys. 99 094305
[17]	Berbezier I, Ronda A, Volpi F and Portavoce A 2003 Surf. Sci. 531 231
[18]	Kamins T I, Medeiros-Ribeiro G, Olhberg D A A and Williams R S J 1999 Appl. Phys. 85 1159
[19]	Floro J A, Sinclair M B, Chason E, Freund L B, Twesten R D, Hwang R Q and Lucadamo G A 2000 Phys. Rev. Lett. 84 701
[20]	Goldfarb I, Hayden P T, Owen J H G and Briggs G A D 1997 Phys. Rev. B 56 10459
[21]	Singha R K, Das S, Majumdar S, Das K, Dhar A and Ray S K 2008 J. Appl. Phys. 103 114301
[22]	Hullavarad S, Hullavarad N and Claflin D B 2009 Nanoscale Res. Lett. 4 1421
[23]	Choi W K, Ng V, Ng S P, Thio H H, Shen Z X and Li W S 1999 J. Appl. Phys. 86 1398
[24]	Samavati A R, Ghoshal S K and Othaman Z 2012 Chin. Phys. Lett. 29 048101
[25]	Jie Y X, Wee A T S, Huan C H A, Sun W X, Shen Z X and Chua S J 2004 Mater. Sci. Eng. B 107 8
[26]	Zacharias M and Fauchet P M 1997 Appl. Phys. Lett. 71 380
[27]	Ginzburg L P, Gordeev A A, Gorchakov A P and Jilinsky A P 1995 J. Non-Cryst. Solids. 183 234
[28]	Gallagher M and Osterberg U 1993 J. Appl. Phys. 74 2771

[1]	Thermally enhanced photoluminescence and temperature sensing properties of Sc₂W₃O₁₂:Eu³⁺ phosphors Yu-De Niu(牛毓德), Yu-Zhen Wang(汪玉珍), Kai-Ming Zhu(朱凯明), Wang-Gui Ye(叶王贵), Zhe Feng(冯喆), Hui Liu(柳挥), Xin Yi(易鑫), Yi-Huan Wang(王怡欢), and Xuan-Yi Yuan(袁轩一). Chin. Phys. B, 2023, 32(2): 028703.
[2]	Surface structure modification of ReSe₂ nanosheets via carbon ion irradiation Mei Qiao(乔梅), Tie-Jun Wang(王铁军), Yong Liu(刘泳), Tao Liu(刘涛), Shan Liu(刘珊), and Shi-Cai Xu(许士才). Chin. Phys. B, 2023, 32(2): 026101.
[3]	Growth behaviors and emission properties of Co-deposited MAPbI₃ ultrathin films on MoS₂ Siwen You(游思雯), Ziyi Shao(邵子依), Xiao Guo(郭晓), Junjie Jiang(蒋俊杰), Jinxin Liu(刘金鑫), Kai Wang(王凯), Mingjun Li(李明君), Fangping Ouyang(欧阳方平), Chuyun Deng(邓楚芸), Fei Song(宋飞), Jiatao Sun(孙家涛), and Han Huang(黄寒). Chin. Phys. B, 2023, 32(1): 017901.
[4]	Enhanced photoluminescence of monolayer MoS₂ on stepped gold structure Yu-Chun Liu(刘玉春), Xin Tan(谭欣), Tian-Ci Shen(沈天赐), and Fu-Xing Gu(谷付星). Chin. Phys. B, 2022, 31(8): 087803.
[5]	Exploration of structural, optical, and photoluminescent properties of (1-x)NiCo₂O₄/xPbS nanocomposites for optoelectronic applications Zein K Heiba, Mohamed Bakr Mohamed, Noura M Farag, and Ali Badawi. Chin. Phys. B, 2022, 31(6): 067801.
[6]	Exciton luminescence and many-body effect of monolayer WS₂ at room temperature Jian-Min Wu(吴建民), Li-Hui Li(黎立辉), Wei-Hao Zheng(郑玮豪), Bi-Yuan Zheng(郑弼元), Zhe-Yuan Xu(徐哲元), Xue-Hong Zhang(张学红), Chen-Guang Zhu(朱晨光), Kun Wu(吴琨), Chi Zhang(张弛), Ying Jiang(蒋英),Xiao-Li Zhu(朱小莉), and Xiu-Juan Zhuang(庄秀娟). Chin. Phys. B, 2022, 31(5): 057803.
[7]	Effect of different catalysts and growth temperature on the photoluminescence properties of zinc silicate nanostructures grown via vapor-liquid-solid method Ghfoor Muhammad, Imran Murtaza, Rehan Abid, and Naeem Ahmad. Chin. Phys. B, 2022, 31(5): 057801.
[8]	Magnetic polaron-related optical properties in Ni(II)-doped CdS nanobelts: Implication for spin nanophotonic devices Fu-Jian Ge(葛付建), Hui Peng(彭辉), Ye Tian(田野), Xiao-Yue Fan(范晓跃), Shuai Zhang(张帅), Xian-Xin Wu(吴宪欣), Xin-Feng Liu(刘新风), and Bing-Suo Zou(邹炳锁). Chin. Phys. B, 2022, 31(1): 017802.
[9]	Pressure- and temperature-dependent luminescence from Tm³⁺ ions doped in GdYTaO₄ Peng-Yu Zhou(周鹏宇), Xiu-Ming Dou(窦秀明), Bao-Quan Sun(孙宝权), Ren-Qin Dou(窦仁琴), Qing-Li Zhang(张庆礼), Bao Liu(刘鲍), Pu-Geng Hou(侯朴赓), Kai-Lin Chi(迟凯粼), and Kun Ding(丁琨). Chin. Phys. B, 2022, 31(1): 017101.
[10]	Controllable preparation and disorder-dependent photoluminescence of morphologically different C₆₀ microcrystals Wen Cui(崔雯), De-Jun Li(李德军), Jin-Liang Guo(郭金良), Lang-Huan Zhao(赵琅嬛), Bing-Bing Liu(刘冰冰), and Shi-Shuai Sun(孙士帅). Chin. Phys. B, 2021, 30(8): 086101.
[11]	Optical spectroscopy study of damage evolution in 6H-SiC by H$_{2}^{ + }$ implantation Yong Wang(王勇), Qing Liao(廖庆), Ming Liu(刘茗), Peng-Fei Zheng(郑鹏飞), Xinyu Gao(高新宇), Zheng Jia(贾政), Shuai Xu(徐帅), and Bing-Sheng Li(李炳生). Chin. Phys. B, 2021, 30(5): 056106.
[12]	Combined effects of carrier scattering and Coulomb screening on photoluminescence in InGaN/GaN quantum well structure with high In content Rui Li(李睿), Ming-Sheng Xu(徐明升), Peng Wang(汪鹏), Cheng-Xin Wang(王成新), Shang-Da Qu(屈尚达), Kai-Ju Shi(时凯居), Ye-Hui Wei(魏烨辉), Xian-Gang Xu(徐现刚), and Zi-Wu Ji(冀子武). Chin. Phys. B, 2021, 30(4): 047801.
[13]	Microstructure, optical, and photoluminescence properties of β -Ga₂O₃ films prepared by pulsed laser deposition under different oxygen partial pressures Rui-Rui Cui(崔瑞瑞), Jun Zhang(张俊), Zi-Jiang Luo(罗子江), Xiang Guo(郭祥), Zhao Ding(丁召), and Chao-Yong Deng(邓朝勇). Chin. Phys. B, 2021, 30(2): 028505.
[14]	Exciton emissions of CdS nanowire array fabricated on Cd foil by the solvothermal method Yong Li(李勇), Peng-Fei Ji(姬鹏飞), Ya-Juan Hao(郝亚娟), Yue-Li Song(宋月丽), Feng-Qun Zhou(周丰群), and Shu-Qing Yuan(袁书卿). Chin. Phys. B, 2021, 30(1): 016104.
[15]	Energy transfer, luminescence properties, and thermal stability of color tunable barium pyrophosphate phosphors Meng-Jiao Xu(徐梦姣), Su-Xia Li(李素霞), Chen-Chen Ji(季辰辰), Wan-Xia Luo(雒晚霞), Lu-Xiang Wang(王鲁香). Chin. Phys. B, 2020, 29(6): 063301.

No Suggested Reading articles found!

Viewed

Full text

Abstract

Cited

Metrics
Related Articles

Germanium nanoislands grown by radio frequency magnetron sputtering：Annealing time dependent surface morphology and photoluminescence

Cite this article:

Online attention