Rugate filters prepared by rapidly alternating deposition
Zhang Jun-Chao(张俊超)a)b), Fang Ming(方明)a), Shao Yu-Chuan(邵宇川)a)b), Jin Yun-Xia(晋云霞)a), and He Hong-Bo(贺洪波) a)†
a Key Laboratory of Material Science and Technology for High Power Lasers, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China; b Graduate University of Chinese Academy of Sciences, Beijing 100049, China
Abstract A methodology for the fabrication of composite (Nb2O5)1-x(SiO2)x thin-film rugate filters by using pulsed direct current magnetron sputtering is presented. The two materials are mixed using rapidly alternating deposition technology. The optical properties of the composite films varying with the composition of the material are studied in detail. Refractive indices between 1.50 and 2.14 can be realized in our coating system. Two designed rugate filters with a reflection band at the wavelength of 532 nm are fabricated using an automatic deposition process. The microstructure of the rugate filter is investigated by using scanning electron microscopy. The calculated and the measured transmittance spectra are in good agreement with each other. The causes of the slight differences between them are also analysed.
Fund: Project supported by the National Natural Science Foundation of China (Grant Nos. 10704079 and 10976030).
Cite this article:
Zhang Jun-Chao(张俊超), Fang Ming(方明), Shao Yu-Chuan(邵宇川), Jin Yun-Xia(晋云霞), and He Hong-Bo(贺洪波) Rugate filters prepared by rapidly alternating deposition 2011 Chin. Phys. B 20 094212
[1]
Lappschies M, Görtz B and Ristau D 2006 Appl. Opt. 45 1502
[2]
Southwell W H 1988 J. Opt. Soc. Am. A 5 1558
[3]
Ishikura N, Fujii M, Nishida K, Hayashi S, Diener J, Mizuhata M and Deki S 2008 Opt. Mater. 31 102
[4]
Zhao L, Sui Z, Zhu Q H, Zhang Y and Zuo Y L 2009 Acta Phys. Sin. 58 3977 (in Chinese)
[5]
Tang C J, Jaing C C, Lee K S and Lee C C 2008 Appl. Opt. 47 C167
[6]
Polenzky C, Rickers C and Vergöhl M 2009 Thin Solid Films 517 3126
[7]
Gunning W J, Hall R L, Woodberry F J, Southwell W H and Gluck N S 1989 Appl. Opt. 28 2945
[8]
Lee C C, Tang C J and Wu J Y 2006 Appl. Opt. 45 1333
[9]
Liu L and Su X R 2008 Chin. Phys. B 17 2170
[10]
Bartzsch H, Lange S, Frach P and Goedicke K 2004 Surf. Coat. Tecnol. 180—181 616
[11]
Katagiri Y and Ukita H 1990 Appl. Opt. 29 5074
[12]
Shen Z C, Shao J D, Wang Y J and Fan Z X 2005 Acta Phys. Sin. 54 4842 (in Chinese)
[13]
Ilyas S, Böcking T, Kilian K, Reece P J, Gooding J, Gaus K and Gal M 2007 Opt. Mater. 29 619
[14]
Hawkeye M M and Brett M J 2006 J. Appl. Phys. 100 044322
[15]
Kong W J, Shen Z C, Wang S H, Shao J D, Fan Z X and Lu C J 2010 Chin. Phys. B 19 044210
[16]
Shen Z C, Kong W J, Shao J D and Fan Z X 2005 Chin. Phys. Lett. 22 224
[17]
Fu X Y, Wang S M, Deng D G, Yi K, Shao J D and Fan Z X 2005 Chin. Phys. Lett. 22 3173
[18]
Wang S M, Fu X Y, Xia G D, Wang J G, Shao J D and Fan Z X 2006 Appl. Surf. Sci. 252 8734
[19]
Southwell W H and Hall R L 1989 Appl. Opt. 28 2949
[1]
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