Deposition pressure effect on the surface roughness scaling of microcrystalline silicon films

doi:10.1088/1674-1056/19/10/106803

Abstract The scaling behaviour of surface roughness evolution of microcrystalline silicon (μc-Si:H) films prepared by very-high frequency plasma-enhanced chemical vapour deposition (VHF-PECVD) has been investigated by using a spectroscopic ellipsometry (SE) technique. The growth exponent β was analysed for the films deposited under different pressures P_g. The results suggest that films deposited at P_g = 70 Pa have a growth exponent β about 0.22, which corresponds to the definite diffusion growth. However, abnormal scaling behaviour occurs in the films deposited at P_g = 300 Pa. The exponent β is about 0.81 that is much larger than 0.5 of zero diffusion limit in the scaling theory. The growth mode of μ c-Si:H deposited at P_g= 300 Pa is clearly different from that of μc-Si:H at P_g = 70 Pa. Monte Carlo simulations indicate that the sticking process and the surface diffusion of the radicals are two key factors to affect the growth mode under different pressures. Under P_g= 300 Pa, β>0.5 is correlated with the strong shadowing effect resulting from the larger sticking coefficient.

Keywords: microcrystalline Si thin film spectroscopic ellipsometry the growth exponent Monte Carlo simulations

Received: 27 September 2009
Revised: 19 April 2010
Accepted manuscript online:

PACS:	52.77.Dq	(Plasma-based ion implantation and deposition)
	68.35.B-	(Structure of clean surfaces (and surface reconstruction))
	68.35.Fx	(Diffusion; interface formation)
	68.55.-a	(Thin film structure and morphology)
	78.30.Am	(Elemental semiconductors and insulators)
	81.15.Gh	(Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.))

Fund: Project supported by the National Key Basic Research Program of China (Grant No. 2006CB202601) and the Natural Science Foundation of Henan Province of China (Grant No. 82300443203).

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Zhu Zhi-Li(朱志立), Ding Yan-Li(丁艳丽), Wang Zhi-Yong(王志永), Gu Jin-Hua(谷锦华), and Lu Jing-Xiao(卢景霄) Deposition pressure effect on the surface roughness scaling of microcrystalline silicon films 2010 Chin. Phys. B 19 106803

[1]	Yan B J, Yue G Z, Banerjee A, Yang J and Guha S 2004 wxMater. Res. Soc. Symp. Proc.808 A bf9 41
[2]	Meier J, Dubail S, Fliickiger R, Fischer D, Keppner H and Shah A 1994 1994 wxIEEE First WCPEC Hawaii
[3]	Hou G F, Xue J M, Sun J, Guo Q C, Zhang D K, Ren H Z, Zhao Y, Geng X H and Li Y G 2007 wxActa Phys. Sin.56 1177 (in Chinese)
[4]	Guo X J, Lu J X, Cheng Y S, Zhang Q F, Wen S T, Zheng W, Shen D H and Cheng Q D 2008 wxActa Phys. Sin.57 6002 (in Chinese)
[5]	Sobajima Y, Nakanoa S, Nishinoa M, Tanakaa Y, Toyamaa T and Okamoto H 2008 wxJ. Non-Cryst. Solids354 2407
[6]	Niikura C, Kondo M and Matsuda A 2004 wxProceedings of the 19th European Photovoltaic Solar Energy Conference Paris, France, p. 1637
[7]	Mai Y, Klein S, Carius R, Stiebig H, Geng X and Finger F 2005wx Appl. Phys. Lett.87 073503
[8]	Mai Y, Klein S, Geng X and Finger F 2004 wxAppl. Phys. Lett.85 2839
[9]	Rezek B, Stuchl'hik J, Fejfar A and Ko"cka J 2002 wxJ. Appl. Phys.92 587
[10]	Zhao Y P, Drotar J T, Wang G C and Lu T M 2001 wxPhys. Rev. Lett.87 136102
[11]	Karabacak T, Zhao Y P, Wang G C and Lu T M 2001 wxPhys. Rev. B64 085323
[12]	Karder M, Parisi G and Zhang Y 1986 wxPhys. Rev. Lett.56 889
[13]	Fujiwara H, Kondo M and Matsuda A 2001 wxPhys. Rev. B63 115306
[14]	Teplin C W, Levi D H, Lwaniczko E, John K M, Perkins J D and Branz H M 2005 wxJ. Appl. Phys.97 103536
[15]	Hamers E A G, Morral A F I and Niikura C 2000 wxJ. Appl. Phys.88 3674

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Deposition pressure effect on the surface roughness scaling of microcrystalline silicon films

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