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Chin. Phys. B, 2024, Vol. 33(3): 036101    DOI: 10.1088/1674-1056/acf447
CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES Prev   Next  

Residual stress modeling of mitigated fused silica damage sites with CO2 laser annealing

Chuanchao Zhang(张传超), Wei Liao(廖威), Lijuan Zhang(张丽娟), Xiaolong Jiang(蒋晓龙), Zhenhua Fang(方振华), and Xiaodong Jiang(蒋晓东)
Laser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, China
Abstract  A numerical model based on measured fictive temperature distributions is explored to evaluate the residual stress fields of CO2 laser-annealed mitigated fused silica damage sites. The proposed model extracts the residual strain from the differences in thermoelastic contraction of fused silica with different fictive temperatures from the initial frozen-in temperatures to ambient temperature. The residual stress fields of mitigated damage sites for the CO2 laser-annealed case are obtained by a finite element analysis of equilibrium equations and constitutive equations. The simulated results indicate that the proposed model can accurately evaluate the residual stress fields of laser-annealed mitigated damage sites with a complex thermal history. The calculated maximum hoop stress is in good agreement with the reported experimental result. The estimated optical retardance profiles from the calculated radial and hoop stress fields are consistent with the photoelastic measurements. These results provide sufficient evidence to demonstrate the suitability of the proposed model for describing the residual stresses of mitigated fused silica damage sites after CO2 laser annealing.
Keywords:  fused silica      damage mitigation      residual stress      laser annealing  
Received:  07 May 2023      Revised:  09 August 2023      Accepted manuscript online:  28 August 2023
PACS:  61.80.Ba (Ultraviolet, visible, and infrared radiation effects (including laser radiation))  
  63.50.Lm (Glasses and amorphous solids)  
  42.70.Ce (Glasses, quartz)  
  78.20.-e (Optical properties of bulk materials and thin films)  
Fund: Project supported by the National Natural Science Foundation of China (Grant No. 62275235).
Corresponding Authors:  Chuanchao Zhang     E-mail:  zhchch@caep.cn

Cite this article: 

Chuanchao Zhang(张传超), Wei Liao(廖威), Lijuan Zhang(张丽娟), Xiaolong Jiang(蒋晓龙), Zhenhua Fang(方振华), and Xiaodong Jiang(蒋晓东) Residual stress modeling of mitigated fused silica damage sites with CO2 laser annealing 2024 Chin. Phys. B 33 036101

[1] Campbell J H, Hawley-Fedder R A, Stolz C J, Menapace J A, Borden M R, Whitman P K, Yu J, Runkel M, Riley M O, Feit M D and Hackel R P 2004 Proc. SPIE 5341 84
[2] Han W, Huang W Q, Wang F, Li K Y, Feng B, Li F Q, Jing F and Zheng W G 2010 Chin. Phys. B 19 106105
[3] Fleurot N, Cavailler C and Bourgade J L 2005 Fusion Eng. Des. 74 147
[4] Norton M A, Adams J J, Carr C W, Donohue E E, Feit M D, Hackel R P, Hollingsworth W G, Jarboe J A, Matthews M J, Rubenchik A M and Spaeth M L 2007 Proc. SPIE 6720 67200
[5] Chai X X, Li P, Zhao J P, Wang G Z, Zhu D Y, Jiang Y L, Chen B, Zhu Q H, Feng B, Wang L Q and Jing Y K 2021 Optik 226 165549
[6] Palmier S, Gallais L, Commandre M, Cormont P, Courchinoux R, Lamaignere L, Rullier J L and Legros P 2009 Appl. Surf. Sci. 255 5532
[7] Adams J J, Bolourchi M, Bude J D, Guss G M, Matthews M J and Nostrand M C 2010 Proc. SPIE 7842 784223
[8] Mendez E, Nowak K M, Baker H J, Villarreal F J and Hall D R 2006 Appl. Opt. 45 5358
[9] Jiang Y, Liu C M, Luo C S, Yuan X D, Xiang X, Wang H J, He S B, Lü H B, Ren W, Zheng W G and Zu X T 2012 Chin. Phys. B 21 054216
[10] Jiang Y, Xiang X, Liu C M, Wang H J, Liao W, Lv H B, Yuan X D, Qiu R, Yang Y J, Zheng W G and Zu X T 2015 J. Non-Cryst. Solids 410 88
[11] Feit M D, Matthews M J, Soules T F, Stolken J S, Vignes R M, Yang S T and Cooke J D 2010 Proc. SPIE 7842 78420
[12] Matthews M J, Stolken J S, Vignes R M, Norton M A, Yang S, Cooke J D, Guss G M and Adams J J 2009 Proc. SPIE 7504 750410
[13] Zhang C C, Liao W, Zhang L J, Ye Y Y, Chen J, Wang H J, Luan X Y and Yuan X D 2014 Adv. Cond. Matter Phys. 2014 638045
[14] Gallais L, Cormont P and Rullier J L 2009 Opt. Express 17 23488
[15] Vignes R M, Soules T F, Stolken J S, Settgast R R, Elhadj S and Matthews M J 2013 J. Am. Ceram. Soc. 96 137
[16] Scherer G W 1990 J. Non-Cryst. Solids 123 75
[17] Zhang C C, Chen Q, Liao W, Dai R C, Zhang L J, Jiang X L, Chen J, Zhang Z M and Jiang X D 2021 Opt. Express 29 42511
[18] Matthews M J, Vignes R M, Cooke D, Yang S T and Stolken J S 2010 Opt. Lett. 35 1311
[19] Noda N, Hetnarski R B and Tanigawa Y 2003 Thermal stresses, 2nd edn. (New York: Taylor & Francis) p. 259
[20] Le Parc R, Levelut C, Pelous J, Martinez V and Champagnon B 2006 J. Phys.: Condens. Matter 18 7507
[21] Kühn B and Schadrack R 2009 J. Non-Cryst. Solids 355 323
[22] Horn G, Lesniak J, Mackin T and Boyce B 2005 Rev. Sci. Instrum. 76 045108
[23] Yang L, Liao W, Miao X X, Yuan X D, Zheng W G, Lv H B, Zhou G R, Zu X T and Xiang X 2015 Opt. Eng. 54 057105
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