Please wait a minute...
Chin. Phys. B, 2022, Vol. 31(5): 056106    DOI: 10.1088/1674-1056/ac3d7e
CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES Prev   Next  

Strategy to mitigate single event upset in 14-nm CMOS bulk FinFET technology

Dong-Qing Li(李东青)1,2,3, Tian-Qi Liu(刘天奇)1,5, Pei-Xiong Zhao(赵培雄)1, Zhen-Yu Wu(吴振宇)4, Tie-Shan Wang(王铁山)3, and Jie Liu(刘杰)1,2,†
1 Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou 730000, China;
2 University of Chinese Academy of Sciences, Beijing 100049, China;
3 School of Physical Science and Technology, Lanzhou University, Lanzhou 730000, China;
4 National University of Defense Technology, Changsha 410000, China;
5 Tsinghua University, Beijing 100084, China
Abstract  Three-dimensional (3D) TCAD simulations demonstrate that reducing the distance between the well boundary and N-channel metal-oxide semiconductor (NMOS) transistor or P-channel metal-oxide semiconductor (PMOS) transistor can mitigate the cross section of single event upset (SEU) in 14-nm complementary metal-oxide semiconductor (CMOS) bulk FinFET technology. The competition of charge collection between well boundary and sensitive nodes, the enhanced restoring currents and the change of bipolar effect are responsible for the decrease of SEU cross section. Unlike dual-interlock cell (DICE) design, this approach is more effective under heavy ion irradiation of higher LET, in the presence of enough taps to ensure the rapid recovery of well potential. Besides, the feasibility of this method and its effectiveness with feature size scaling down are discussed.
Keywords:  TCAD simulation      FinFET      single event upset (SEU) mitigation  
Received:  27 September 2021      Revised:  15 November 2021      Accepted manuscript online: 
PACS:  61.80.Az (Theory and models of radiation effects)  
  61.80.Jh (Ion radiation effects)  
  85.30.De (Semiconductor-device characterization, design, and modeling)  
Fund: Project supported by the National Natural Science Foundation of China (Grant Nos.12035019,11690041,and 62004221).
Corresponding Authors:  Jie Liu,E-mail:J.Liu@impcas.ac.cn     E-mail:  J.Liu@impcas.ac.cn
About author:  2021-11-26

Cite this article: 

Dong-Qing Li(李东青), Tian-Qi Liu(刘天奇), Pei-Xiong Zhao(赵培雄), Zhen-Yu Wu(吴振宇), Tie-Shan Wang(王铁山), and Jie Liu(刘杰) Strategy to mitigate single event upset in 14-nm CMOS bulk FinFET technology 2022 Chin. Phys. B 31 056106

[1] Calin T, Nicolaidis M and Velazco R 1996 IEEE Trans. Nucl. Sci. 43 2874
[2] Amusan O A, Witulski A F, Massengill L W, Bhuva B L, Fleming P R, Alles M L, Sternberg A L, Black J D and Schrimpf R D 2006 IEEE Trans. Nucl. Sci. 53 3253
[3] Giot D, Roche P, Gasiot G and Harboe-Sorensen R 2007 IEEE Trans. Nucl. Sci. 54 904
[4] Giot D, Roche P, Gasiot G, Autran J L and Harboe-Sørensen R 2008 IEEE Trans. Nucl. Sci. 55 2048
[5] Gorbunov M S, Dolotov P S, Antonov A A, Zebrev G I, Emeliyanov V V, Boruzdina A B, Petrov A G and Ulanova A V 2014 IEEE Trans. Nucl. Sci. 61 1575
[6] Luo Y H, Zhang F Q, Guo H X and Hajdas W 2020 Acta Phys. Sin. 69 018501 (in Chinese)
[7] Loveless T D, Jagannathan S, Reece T, Chetia J, Bhuva B L, McCurdy M W, Massengill L W, Wen S J, Wong R and Rennie D 2011 IEEE Trans. Nucl. Sci. 53 1008
[8] Gorbunov M S, Boruzdina A B and Dolotov P S 2016 IEEE Trans. Nucl. Sci. 63 2250
[9] Luo Y H, Chen W, Zhang F Q and Wang T 2021 Chin. Phys. B 30 048502
[10] Amusan O A, Massengill L W, Baze M P, Bhuva B L, Witulski A F, Black J D, Balasubramanian A, Casey M C, Black D A, Ahlbin J R and Reed R A 2009 IEEE Trans. Dev. Mater. Rel. 9 311
[11] Raine M, Gaillardin M, Lagutere T, Duhamel O and Paillet P 2018 IEEE Trans. Nucl. Sci. 65 339
[12] Chen J J, Chen S M, He B Y, Chi Y Q, Qin J R, Liang B and Liu B W 2012 IEEE Trans. Nucl. Sci. 59 2859
[13] Narasimham B, Bhuva B L, Schrimpf R D, Massengill L W, Gadlage M J and Holman W T 2008 IEEE Trans. Nucl. Sci. 55 1708
[14] Chen J J, Chi Y Q and Liang B 2015 Chin. Phys. B 24 016012
[15] Wu Z Y and Chen S M 2018 IEEE Trans. Nucl. Sci. 65 418
[16] Ramamurthy C, Chellappa S, Vashishtha V, Gogulamudi A and Clark L T 2015 IEEE Trans. Nucl. Sci. 62 3040
[17] Atkinson N M, Witulski A F, Holman W T, Ahlbin J R, Bhuva B L and Massengill L W 2011 IEEE Trans. Nucl. Sci. 58 885
[18] Karp J, Hart M J, Maillard P, Hellings G and Linten D 2018 IEEE Trans. Nucl. Sci 65 217
[19] Amusan O A, Massengill L W, Bhuva B L, Dasgupta S, Witulski A F and Ahlbin J R 2007 IEEE Trans. Nucl. Sci. 54 2060
[20] Raine M, Valentin A, Gaillardin M and Paillet P 2012 IEEE Trans. Nucl. Sci. 59 840
[21] Raine M, Gaillardin M, Paillet P and Duhamel O 2014 IEEE Trans. Nucl. Sci. 61 1791
[22] Akkerman A, Barak J and Emfietzoglou D 2005 Nucl. Instrum. Method Phys. Res. B 227 319
[23] Raine M, Hubert G, Gaillardin M, Artola L, Paillet P, Girard S, Sauvestre J E and Bournel A 2011 IEEE Trans. Nucl. Sci. 58 840
[24] http://ptm.asu.edu
[25] Synopsys 2013 Three-dimensional Simulation of 14/16 nm FinFETs with Round Fin Corners and Tapered Fin Shape
[26] Yu J T, Chen S M, Chen J J and Huang P C 2016 16th European Conference on Radiation and Its Effects on Components and Systems, 2016 Bremen, Germany, pp. 1-4
[27] Wu Y C and Jhan Y R 2018 3D TCAD Simulation for CMOS Nanoeletronic Devices (Taiwan: Springer) pp. 185-195
[28] Nsengiyumva P, Massengill L W, Alles M L, Ball D R, Kauppila J S, Schrimpf R D, Reed R A, Bhuva B L and Holman W T 2017 42nd Government Microcircuit Appl. Critical Technol March, 2017
[29] Nsengiyumva P, Massengill L W, Alles M L, Bhuva B L, Ball D R, Kauppila J S, Haeffner T D, Holman W T and Reed R A 2017 IEEE Trans. Nucl. Sci. 59 2666
[30] Harrington R C, Kauppila J S, Maharrey J A, Haeffner T D, Sternberg A L, Zhang E X, Ball D R, Nsengiyumva P, Bhuva B L and Massengill L W 2019 IEEE Trans. Nucl. Sci. 66 1427
[31] Horiguchi N, Demuynck S, Ercken M, et al. 2010 Proceedings of the IEEE Symposium on Vlsi Technology, pp. 23-24
[32] Gadlage M J, Ahlbin J R, Narasimham B, Bhuva B L, Massengill L W and Schrimpf R D 2011 IEEE Trans. Dev. Mat. Rel. 11 179
[33] Jagannathan S, Gadlage M J, Bhuva B L, Schrimpf R D, Narasimham B and Chetia J 2010 IEEE Trans. Nucl. Sci. 57 3386
[34] Dai C T, Chen S H, Linten D, Scholz M, Hellings G, Boschke R, Karp J, Hart M, Groeseneken G, Ker M D, Mocuta A and Horiguchi N 2017 IEEE International Reliability Physics Symposium, 2-7 April, 2017, Monterey, CA, USA pp. EL-1.1-EL-1.3
[35] https://www.intel.com/content/dam/www/public/us/en/documents/pdf/foundry/mark-bohr-2014-idf-presentation.pdf
[1] Experiment and simulation on degradation and burnout mechanisms of SiC MOSFET under heavy ion irradiation
Hong Zhang(张鸿), Hongxia Guo(郭红霞), Zhifeng Lei(雷志锋), Chao Peng(彭超), Zhangang Zhang(张战刚), Ziwen Chen(陈资文), Changhao Sun(孙常皓), Yujuan He(何玉娟), Fengqi Zhang(张凤祁), Xiaoyu Pan(潘霄宇), Xiangli Zhong(钟向丽), and Xiaoping Ouyang(欧阳晓平). Chin. Phys. B, 2023, 32(2): 028504.
[2] Impact of incident direction on neutron-induced single-bit and multiple-cell upsets in 14 nm FinFET and 65 nm planar SRAMs
Shao-Hua Yang(杨少华), Zhan-Gang Zhang(张战刚), Zhi-Feng Lei(雷志锋), Yun Huang(黄云), Kai Xi(习凯), Song-Lin Wang(王松林), Tian-Jiao Liang(梁天骄), Teng Tong(童腾), Xiao-Hui Li(李晓辉), Chao Peng(彭超), Fu-Gen Wu(吴福根), and Bin Li(李斌). Chin. Phys. B, 2022, 31(12): 126103.
[3] An insulated-gate bipolar transistor model based on the finite-volume charge method
Manhong Zhang(张满红) and Wanchen Wu(武万琛). Chin. Phys. B, 2022, 31(12): 128501.
[4] Dependence of short channel length on negative/positive bias temperature instability (NBTI/PBTI) for 3D FinFET devices
Ren-Ren Xu(徐忍忍), Qing-Zhu Zhang(张青竹), Long-Da Zhou(周龙达), Hong Yang(杨红), Tian-Yang Gai(盖天洋), Hua-Xiang Yin(殷华湘), and Wen-Wu Wang(王文武). Chin. Phys. B, 2022, 31(1): 017301.
[5] Device topological thermal management of β-Ga2O3 Schottky barrier diodes
Yang-Tong Yu(俞扬同), Xue-Qiang Xiang(向学强), Xuan-Ze Zhou(周选择), Kai Zhou(周凯), Guang-Wei Xu(徐光伟), Xiao-Long Zhao(赵晓龙), and Shi-Bing Long(龙世兵). Chin. Phys. B, 2021, 30(6): 067302.
[6] High crystalline quality of SiGe fin fabrication with Si-rich composition area using replacement fin processing
Ying Zan(昝颖), Yong-Liang Li(李永亮), Xiao-Hong Cheng(程晓红), Zhi-Qian Zhao(赵治乾), Hao-Yan Liu(刘昊炎), Zhen-Hua Hu(吴振华), An-Yan Du(都安彦), Wen-Wu Wang(王文武). Chin. Phys. B, 2020, 29(8): 087303.
[7] Investigation of gate oxide traps effect on NAND flash memory by TCAD simulation
He-Kun Zhang(章合坤), Xuan Tian(田璇), Jun-Peng He(何俊鹏), Zhe Song(宋哲), Qian-Qian Yu(蔚倩倩), Liang Li(李靓), Ming Li(李明), Lian-Cheng Zhao(赵连城), Li-Ming Gao(高立明). Chin. Phys. B, 2020, 29(3): 038501.
[8] PBTI stress-induced 1/ f noise in n-channel FinFET
Dan-Yang Chen(陈丹旸), Jin-Shun Bi(毕津顺), Kai Xi(习凯), and Gang Wang(王刚). Chin. Phys. B, 2020, 29(12): 128501.
[9] Research on SEE mitigation techniques using back junction and p+ buffer layer in domestic non-DTI SiGe HBTs by TCAD
Jia-Nan Wei(魏佳男), Chao-Hui He(贺朝会), Pei Li(李培), Yong-Hong Li(李永宏). Chin. Phys. B, 2019, 28(6): 068503.
[10] Characteristics and threshold voltage model of GaN-based FinFET with recessed gate
Chong Wang(王冲), Xin Wang(王鑫), Xue-Feng Zheng(郑雪峰), Yun Wang(王允), Yun-Long He(何云龙), Ye Tian(田野), Qing He(何晴), Ji Wu(吴忌), Wei Mao(毛维), Xiao-Hua Ma(马晓华), Jin-Cheng Zhang(张进成), Yue Hao(郝跃). Chin. Phys. B, 2018, 27(9): 097308.
[11] Influence of fin architectures on linearity characteristics of AlGaN/GaNFinFETs
Ting-Ting Liu(刘婷婷), Kai Zhang(张凯), Guang-Run Zhu(朱广润), Jian-Jun Zhou(周建军), Yue-Chan Kong(孔月婵), Xin-Xin Yu(郁鑫鑫), Tang-Sheng Chen(陈堂胜). Chin. Phys. B, 2018, 27(4): 047307.
[12] Impact of neutron-induced displacement damage on the single event latchup sensitivity of bulk CMOS SRAM
Xiao-Yu Pan(潘霄宇), Hong-Xia Guo(郭红霞), Yin-Hong Luo(罗尹虹), Feng-Qi Zhang(张凤祁), Li-Li Ding(丁李利), Jia-Nan Wei(魏佳男), Wen Zhao(赵雯). Chin. Phys. B, 2017, 26(1): 018501.
[13] An analytical model for nanowire junctionless SOI FinFETs with considering three-dimensional coupling effect
Fan-Yu Liu(刘凡宇), Heng-Zhu Liu(刘衡竹), Bi-Wei Liu(刘必慰), Yu-Feng Guo(郭宇峰). Chin. Phys. B, 2016, 25(4): 047305.
[14] Effect of supply voltage and body-biasing on single-event transient pulse quenching in bulk fin field-effect-transistor process
Jun-Ting Yu(于俊庭), Shu-Ming Chen(陈书明), Jian-Jun Chen(陈建军), Peng-Cheng Huang(黄鹏程), Rui-Qiang Song(宋睿强). Chin. Phys. B, 2016, 25(4): 049401.
[15] Fin width and height dependence of bipolar amplification in bulk FinFETs submitted to heavy ion irradiation
Yu Jun-Ting (于俊庭), Chen Shu-Ming (陈书明), Chen Jian-Jun (陈建军), Huang Peng-Cheng (黄鹏程). Chin. Phys. B, 2015, 24(11): 119401.
No Suggested Reading articles found!