Please wait a minute...
Chin. Phys. B, 2015, Vol. 24(6): 065204    DOI: 10.1088/1674-1056/24/6/065204
PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES Prev   Next  

Effect of deposition parameters on structural and mechanicalproperties of niobium nitride synthesized by plasma focus device

Jamil Siddiquia b, Tousif Hussaina, Riaz Ahmada b, Nida Khalidb
a Center for Advanced Studies in Physics (CASP), 1-Church Road, GC University, Lahore, Pakistan;
b Department of Physics, Government College University, 54000 Lahore, Pakistan
Abstract  Effects of deposition angle and axial distance on the structural and mechanical properties of niobium nitride synthesized by a dense plasma focus (DPF) system are studied. The x-ray diffraction (XRD) confirms that the deposition parameters affect the growth of multi-phase niobium nitride. Scanning electron microscopy (SEM) shows the granular surface morphology with strong thermally assisted coagulation effects observed at the 5-cm axial distance. The non-porous granular morphology observed at the 9-cm distance along the anode axis is different from those observed at deposition angles of 10° and 20°. Energy dispersive x-ray (EDX) spectroscopy reveals the maximum nitrogen content at the shortest (5 cm) axial position. Atomic force microscopy (AFM) exhibits that the roughness of coated films varies for coatings synthesized at different axial and angular positions, and the Vickers micro-hardness test shows that a maximum hardness value is (08.44± 0.01) GPa for niobium nitride synthesized at 5-cm axial distance, which is about 500% more than that of a virgin sample.
Keywords:  DPF device      niobium nitride      XRD      SEM      AFM      micro-hardness  
Received:  19 September 2014      Revised:  15 January 2015      Accepted manuscript online: 
PACS:  52.59.Hq (Dense plasma focus)  
  52.77.Dq (Plasma-based ion implantation and deposition)  
  61.05.cp (X-ray diffraction)  
  62.20.Qp (Friction, tribology, and hardness)  
Fund: Project supported by the HEC, Pakistan.
Corresponding Authors:  Tousif Hussain     E-mail:  tousifhussain@gcu.edu.pk
About author:  52.59.Hq; 52.77.Dq; 61.05.cp; 62.20.Qp

Cite this article: 

Jamil Siddiqui, Tousif Hussain, Riaz Ahmad, Nida Khalid Effect of deposition parameters on structural and mechanicalproperties of niobium nitride synthesized by plasma focus device 2015 Chin. Phys. B 24 065204

[1] Brayner R, Rodrigues J A J and Cruz G M 2000 Catalysis Today 57 219
[2] Oyama S T 1992 Catalysis Today 15 179
[3] Manaud J P, Poulon, Gomez S and Petiticorps Y L 2007 Surf. Coat. Technol. 202 222
[4] Fenker M, Kappl H, Banahk O, Martin N and Pierson J F 2006 Surf. Coat. Technol. 201 4152
[5] Savisalo T, Lewis D B and Hovsepian P E 2006 Surf. Coat. Technol. 200 2731
[6] Havey K S, Zabinski J S and Walck S D 1997 Thin Solid Films 303 238
[7] Bekermann D, Barreca D, Gasparotto A, Becker H W, Fischer R A and Devi A 2009 Surf. Coat. Technol. 204 404
[8] Singh K, Bidaye A C and Suri A K V 1999 Nucl. Instrum. Methods Phys. Res. B 148 925
[12] Alén P, Ritala M, Arstila K, Keinonen J and Leskelä M 2005 Thin Solid Films 491 235
[13] Baunemann A, Bekermann D, Thiede T B, Parala H, Winter M, Gemel C and Fischer R A 2008 Dalton Trans. 28 3715
[14] Brauer G and Less J 1960 Common Met. 2 131
[15] Fenker M, Kappl H, Petrikowski K and Bretzler R 2005 Surf. Coat. Technol. 200 1356
[16] Wong M S, Sproul W D, Chu X and Barnett S A 1995 Thin Solid Films 259 146
[18] Cappucio G, Gambardella U, Morone A, Orlando S and Parisi G P 1993 J. Mater. Sci. Lett. 12 322
[20] Zhitomirsky V N, Grimberg I and Rapoport 1998 Thin Solid Films 326 134
[21] Darlinski A and Halbritter J 1987 Surf. Interface Anal. 10 223
[22] Angelkort C, Lewalter H, Warbichler H, Hofer F, Bock W and Kolbesen B O 2001 Spectrochim. Acta Part A 57 2077
[23] Soto L 2005 Plasma Phys. Control Fusion 47 A361
[24] Bhuyan H, Chaqui H, Favre M, Mitchell I and Wyndham E 2005 J. Phys. D: Appl. Phys. 38 1164
[25] Yousefi H R, Mohanty S R, Nakada Y, Ito H and Masugata K 2006 Phys. Plasmas 13 114506
[26] Zakaullah M, Waheed A, Ahmad S, Zeb S and Hussain S 2003 Plasma Sources Sci. Technol. 12 443
[27] Koh M J, Rawat R S, Patran A, Zhang T, Wong D, Springham S V, Tan T L, Lee S and Lee P 2005 Plasma Sources Sci. Technol. 14 12
[28] Shafiq M, Khan A A, Hussain S, Sharif M, Ahmad R, Bhatti S H, Waheed A and Zakaullah M 2004 Plasma Devices Operations 12 305
[29] Rawat R S, Aggarwal V, Hassan M, Lee P, Springham S V, Tan T L and Lee S 2008 Appl. Surf. Sci. 255 2932
[30] Rawat R S, Srivastava M P, Tandon S and Mansingh A 1993 Phys. Rev. B 47 4858
[31] Rawat R S 2013 IEEE Trans. Plasma Sci. 41 701
[32] Kant C R, Srivastava M P and Rawat R S 1998 Phys. Lett. A 239 109
[33] Gupta R and Srivastava M P 2004 Plasma Sources Sci. Technol. 13 371
[34] Nayak B B, Acharya B S, Mohanty S R, Borthakur T K and Bhuyan H 2003 Surf. Coat. Technol. 173 276
[36] Rawat R S, Lee P, White T, Ying L and Lee S 2001 Surf. Coat. Technol. 138 159
[37] Takao K, Honda T, Kitamura I and Masugata K 2003 Plasma Sources Sci. Technol. 12 407
[38] Foerster C E, da Silva S L R, Fitz T, Dekorsy T, Prokert F, Kreibig U, Richter E, Moller W, Mucklich W, Lpienski C M and de M Siqueira C J 2006 Surf. Coat. Technol. 200 5210
[39] Hussain T, Ahmad R, Khan I A, Siddiqui J, Khalid N, Bhatti A S and Naseem S 2009 Nucl. Instrum. Methods Phys. Res. B 267 768
[40] Kies W, Decker G, Berntien U, Sidelnikov Y V, Glushkov D A, Koshelev K N, Simanovskii D M and Babashev S V 2000 Plasma Sources Sci. Technol. 9 279
[41] Hussain T, Ahmad R, Khalid N, Umar Z A and Hussnain A 2013 Chin. Phys. B 22 055204
[42] Hassan M, Qayyum A, Ahmad S, Mahmood S, Shafiq M, Zakaullah M, Lee P and Rawat R S 2014 Appl. Surf. Sci. 303 187
[43] Umar Z A, Rawat R S, Ahmad R, Kumar A K, Wang Y, Hussain T, Chen Z, Shen L and Zhang Z 2014 Chin. Phys. B 23 025204
[44] Joint Committee on Powder Diffraction Standards (JCPDS)–International Centre for Diffraction Data (ICDD) Card Numbers: 03-065-3417
[45] Joint Committee on Powder Diffraction Standards (JCPDS)–International Centre for Diffraction Data (ICDD) Card Numbers: 01-012-0437
[46] Mohanty S R, Bhuyan H, Kumar N N, Rout R K and Hotta E 2005 Jpn. J. Appl. Phys. 44 5199
[47] Hassan M, Qayyum A, Ahmad R, Murtaza G and Zakaullah M 2007 J. Phys. D: Appl. Phys. 40 769
[48] Khan I A, Rawat R S, Verma R, Macharaga G and Ahmad R 2011 J. Crystal Growth 317 98
[49] Hassan M, Ahmad R, Qayyum A, Murtaza G, Waheed A and Zakaullah M 2006 Vacuum 81 291
[50] Sanchez G and Feugeas J 1997 J. Phys. D: Appl. Phys. 30 927
[51] Khan I A, Hassan M, Ahmad R, Qayyum A, Murtaza G, Zakaullah M and Rawat R S 2008 Thin Solid Films 516 8255
[52] Feugeas J, Sanchez G, de Gonzalez C O, Hermida J D and Scordia G 1994 Rad. Eff. Defects Solids 128 267
[53] Hassan M, Rawat R S, Lee P, Hassan S M, Qayyum A, Ahmad R, Murtaza G and Zakaullah M 2008 Appl. Phys. A 90 669
[54] Sohrabi M, Habibi M, Yousefi H R and Roshani G H 2013 Contrib. Plasma Phys. 53 592
[55] Breese M B H 2000 Mater. Res. Soc. Bull. 25 11
[56] Hussain T, Ahmad R, Siddiqui J and Khalid N 2011 Radiation Effects & Defects in Solids 166 873
[57] Bertalot L, Herold H, Jäger U, Mozer A, Oppenländer T, Sadowski M and Schmidt H 1980 Phys. Lett. A 79 389
[58] Ozturk O and Willianson D L 1995 J. Appl. Phys. 77 3839
[1] First-principles study of the bandgap renormalization and optical property of β-LiGaO2
Dangqi Fang(方党旗). Chin. Phys. B, 2023, 32(4): 047101.
[2] Tailoring of thermal expansion and phase transition temperature of ZrW2O8 with phosphorus and enhancement of negative thermal expansion of ZrW1.5P0.5O7.75
Chenjun Zhang(张晨骏), Xiaoke He(何小可), Zhiyu Min(闵志宇), and Baozhong Li(李保忠). Chin. Phys. B, 2023, 32(4): 048201.
[3] A simple semiempirical model for the static polarizability of electronically excited atoms and molecules
Alexander S Sharipov, Alexey V Pelevkin, and Boris I Loukhovitski. Chin. Phys. B, 2023, 32(4): 043301.
[4] Mode characteristics of VCSELs with different shape and size oxidation apertures
Xin-Yu Xie(谢新宇), Jian Li(李健), Xiao-Lang Qiu(邱小浪), Yong-Li Wang(王永丽), Chuan-Chuan Li(李川川), Xin Wei(韦欣). Chin. Phys. B, 2023, 32(4): 044206.
[5] Li2NiSe2: A new-type intrinsic two-dimensional ferromagnetic semiconductor above 200 K
Li-Man Xiao(肖丽蔓), Huan-Cheng Yang(杨焕成), and Zhong-Yi Lu(卢仲毅). Chin. Phys. B, 2023, 32(3): 037501.
[6] Enhanced and tunable Imbert-Fedorov shift based on epsilon-near-zero response of Weyl semimetal
Ji-Peng Wu(伍计鹏), Yuan-Jiang Xiang(项元江), and Xiao-Yu Dai(戴小玉). Chin. Phys. B, 2023, 32(3): 037503.
[7] Crystal and electronic structure of a quasi-two-dimensional semiconductor Mg3Si2Te6
Chaoxin Huang(黄潮欣), Benyuan Cheng(程本源), Yunwei Zhang(张云蔚), Long Jiang(姜隆), Lisi Li(李历斯), Mengwu Huo(霍梦五), Hui Liu(刘晖), Xing Huang(黄星), Feixiang Liang(梁飞翔), Lan Chen(陈岚), Hualei Sun(孙华蕾), and Meng Wang(王猛). Chin. Phys. B, 2023, 32(3): 037802.
[8] Experiment and simulation on degradation and burnout mechanisms of SiC MOSFET under heavy ion irradiation
Hong Zhang(张鸿), Hongxia Guo(郭红霞), Zhifeng Lei(雷志锋), Chao Peng(彭超), Zhangang Zhang(张战刚), Ziwen Chen(陈资文), Changhao Sun(孙常皓), Yujuan He(何玉娟), Fengqi Zhang(张凤祁), Xiaoyu Pan(潘霄宇), Xiangli Zhong(钟向丽), and Xiaoping Ouyang(欧阳晓平). Chin. Phys. B, 2023, 32(2): 028504.
[9] A field-effect WSe2/Si heterojunction diode
Rui Yu(余睿), Zhe Sheng(盛喆), Wennan Hu(胡文楠), Yue Wang(王越), Jianguo Dong(董建国), Haoran Sun(孙浩然), Zengguang Cheng(程增光), and Zengxing Zhang(张增星). Chin. Phys. B, 2023, 32(1): 018505.
[10] Lateral characteristics improvements of DBR laser diode with tapered Bragg grating
Qi-Qi Wang(王琦琦), Li Xu(徐莉), Jie Fan(范杰), Hai-Zhu Wang(王海珠), and Xiao-Hui Ma(马晓辉). Chin. Phys. B, 2022, 31(9): 094204.
[11] Single-mode lasing in a coupled twin circular-side-octagon microcavity
Ke Yang(杨珂), Yue-De Yang(杨跃德), Jin-Long Xiao(肖金龙), and Yong-Zhen Huang(黄永箴). Chin. Phys. B, 2022, 31(9): 094205.
[12] On the Onsager-Casimir reciprocal relations in a tilted Weyl semimetal
Bingyan Jiang(江丙炎), Jiaji Zhao(赵嘉佶), Lujunyu Wang(王陆君瑜), Ran Bi(毕然), Juewen Fan(范珏雯), Zhilin Li(李治林), and Xiaosong Wu(吴孝松). Chin. Phys. B, 2022, 31(9): 097306.
[13] Precisely controlling the twist angle of epitaxial MoS2/graphene heterostructure by AFM tip manipulation
Jiahao Yuan(袁嘉浩), Mengzhou Liao(廖梦舟), Zhiheng Huang(黄智恒), Jinpeng Tian(田金朋), Yanbang Chu(褚衍邦), Luojun Du(杜罗军), Wei Yang(杨威), Dongxia Shi(时东霞), Rong Yang(杨蓉), and Guangyu Zhang(张广宇). Chin. Phys. B, 2022, 31(8): 087302.
[14] Adaptive semi-empirical model for non-contact atomic force microscopy
Xi Chen(陈曦), Jun-Kai Tong(童君开), and Zhi-Xin Hu(胡智鑫). Chin. Phys. B, 2022, 31(8): 088202.
[15] High-pressure study of topological semimetals XCd2Sb2 (X = Eu and Yb)
Chuchu Zhu(朱楚楚), Hao Su(苏豪), Erjian Cheng(程二建), Lin Guo(郭琳), Binglin Pan(泮炳霖), Yeyu Huang(黄烨煜), Jiamin Ni(倪佳敏), Yanfeng Guo(郭艳峰), Xiaofan Yang(杨小帆), and Shiyan Li(李世燕). Chin. Phys. B, 2022, 31(7): 076201.
No Suggested Reading articles found!