Tunable Ba0.5Sr0.5TiO3 film bulk acoustic resonators using SiO2/Mo Bragg reflectors

doi:10.1088/1674-1056/21/10/106801

Abstract Tunable and switchable Ba_0.5Sr_0.5TiO₃ film bulk acoustic resonators (FBARs) based on SiO₂/Mo Bragg reflectors are explored, which can withstand high temperature for the deposition of Ba_xSr_1-xTiO₃ (BST) films at 800 ℃. The dc bias-dependent resonance may be attributed to the piezoelectricity of the BST film induced by an electrostrictive effect. The series resonant frequency is strongly dc bias-dependent and shifts downwards with dc bias increasing, while the parallel resonant frequency is only weakly dc bias-dependent and slightly shifts upwards at low dc bias (< 45 V) while downwards at higher dc bias. The calculated relative tunability of shifts at series resonance frequency is around -2.3% and the electromechanical coupling coefficient is up to approximately 8.09% at 60-V dc bias, which can be comparable to AlN FBARs. This suggests that a high-quality tunable BST FBAR device can be achieved through the use of molybdenum (Mo) as the high acoustic impedance layer in a Bragg reflector, which not only provides excellent acoustic isolation from the substrate, but also improves the crystallinity of BST films withstanding higher deposition temperature.

Keywords: Ba_xSr_1-xTiO₃ tunable film bulk acoustic wave resonator ferroelectric acoustic Bragg reflector

Received: 04 March 2012
Revised: 28 April 2012
Accepted manuscript online:

PACS:	68.60.Bs	(Mechanical and acoustical properties)
	72.50.+b	(Acoustoelectric effects)

Fund: Project supported by the National Natural Science Foundation of China (Grant Nos. 60871049 and 50972024).

Corresponding Authors: Yang Tian-Ying, Jiang Shu-Wen
E-mail: yangtianying521@163.com; jiangsw@uestc.edu.cn

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Yang Tian-Ying (杨天应), Jiang Shu-Wen (蒋书文), Li Ru-Guan (李汝冠), Jiang Bin (姜斌) Tunable Ba_0.5Sr_0.5TiO₃ film bulk acoustic resonators using SiO₂/Mo Bragg reflectors 2012 Chin. Phys. B 21 106801

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Tunable Ba0.5Sr0.5TiO3 film bulk acoustic resonators using SiO2/Mo Bragg reflectors

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Tunable Ba_0.5Sr_0.5TiO₃ film bulk acoustic resonators using SiO₂/Mo Bragg reflectors