Chin. Phys. B
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Chin. Phys. B  2012, Vol. 21 Issue (8): 086101    DOI: 10.1088/1674-1056/21/8/086101
CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES Current Issue| Next Issue| Archive| Adv Search |
Mechanical properties of silicon nanobeams with undercut evaluated by combining dynamic resonance test and finite element analysis
Zhang Jia-Honga b, Mao Xiao-Lia b, Liu Qing-Quana b, Gu Fangc, Li Mina b, Liu Henga b, Ge Yi-Xiana b
a Jiangsu Key Laboratory of Meteorological Observation and Information Processing, Nanjing University of Information Science & Technology, Nanjing 210044, China;
b College of Electronic & Information Engineering, Nanjing University of Information Science & Technology, Nanjing 210044, China;
c College of Physics & Opto-Electronic Engineering, Nanjing University of Information Science & Technology, Nanjing 210044, China

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