Chin. Phys. B
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Chin. Phys. B  2012, Vol. 21 Issue (5): 057301    DOI: 10.1088/1674-1056/21/5/057301
CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES Current Issue| Next Issue| Archive| Adv Search |
Improving lithographic masks with the assistance of indentations
Guo Ying-Nana,Li Xu-Fengb,Pan Shia,Wang Qiaoa,Wang Shuoa,Wu Yong-Kuana
1. School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China;
2. School of Applied Science, Taiyuan University of Science and Technology, Taiyuan 030024, China

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