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Chin. Phys. B, 2015, Vol. 24(7): 075202    DOI: 10.1088/1674-1056/24/7/075202

Effects of N2/O2 flow rate on the surface properties and biocompatibility of nano-structured TiOxNy thin films prepared by high vacuum magnetron sputtering

Sehrish Saleema b, R. Ahmada, Uzma Ikhlaqa, R. Ayubc, Jin Wei Hongb, Xu Rui Zhenb, Li Peng Huib, Khizra Abbasa, Paul K. Chub
a Department of Physics, Government College University, Lahore 54000, Pakistan;
b Department of Physics and Materials Science, City University of Hong Kong, Kowloon, Hong Kong, China;
c Centre for Advanced Studies in Physics (CASP), Government College University, Lahore 54000, Pakistan

NiTi shape memory alloys (SMA) have many biomedical applications due to their excellent mechanical and biocompatible properties. However, nickel in the alloy may cause allergic and toxic reactions, which limit some applications. In this work, titanium oxynitride films were deposited on NiTi samples by high vacuum magnetron sputtering for various nitrogen and oxygen gas flow rates. The x-ray diffraction (XRD) and x-ray photoelectron spectroscopy (XPS) results reveal the presence of different phases in the titanium oxynitride thin films. Energy dispersive spectroscopy (EDS) elemental mapping of samples after immersion in simulated body fluids (SBF) shows that Ni is depleted from the surface and cell cultures corroborate the enhanced biocompatibility in vitro.

Keywords:  titanium oxynitride films      magnetron sputtering      biocompatibility     
Received:  08 September 2014      Published:  05 July 2015
PACS:  52.40.Hf (Plasma-material interactions; boundary layer effects)  
  81.15.Cd (Deposition by sputtering)  
  87.85.jj (Biocompatibility)  

Project supported by the Higher Education Commission, Hong Kong Research Grants Council (RGC) General Research Funds (GRF), China (Grant No. 112212) and the City University of Hong Kong Applied Research Grant (ARG), China (Grant No. 9667066).

Corresponding Authors:  R. Ahmad     E-mail:

Cite this article: 

Sehrish Saleem, R. Ahmad, Uzma Ikhlaq, R. Ayub, Jin Wei Hong, Xu Rui Zhen, Li Peng Hui, Khizra Abbas, Paul K. Chu Effects of N2/O2 flow rate on the surface properties and biocompatibility of nano-structured TiOxNy thin films prepared by high vacuum magnetron sputtering 2015 Chin. Phys. B 24 075202

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