AbstractThe available electron cyclotron resonance plasma source has been simulated in two-dimensional configuration space (z, r) and three-dimensional velocity space (Vz, Vr, V$\theta$). The simulation is focused on the magnetic field gradient effects on ion flux behaviors in electron cyclotron resonance plasma sources. The simulation results show that, when the magnetic field gradients increase, electron temperature, plasma density, ionization rate, and ion flux in Z-direction would decrease, while ion energy and plasma potential would increase.
Received: 31 July 1997
Revised: 24 March 1998
Accepted manuscript online:
Shao Fu-qiu (邵福球), Wang Long (王龙), Wu Han-ming (吴汉明), Yao Xin-zi (姚鑫兹) MAGNETIC FIELD GRADIENT EFFECTS ON ION FLUX BEHAVIORS IN ECR PLASMA SOURCES 1998 Acta Physica Sinica (Overseas Edition) 7 688
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